3 Port Solenoid Valve/

supplying flow adjusted air with the throttle by energizing valve 1 and valve 2. 2(A) VP544-X555 P1 Soft start-up valve : OFF Valve 1, Valve 2: ON Soft start-up valve 0 Time 3(R) 3(R) 1 Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position Series VP/VG Standards and Enclosure Standards Enclosure Machinery Directive 2006/42

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

CE2

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C GA H1 FF GL F GD D E E GC M BB J BL C CC D EE GB K AA AL Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

C76

Auto Switch Mounting Height (mm) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C Bore Hs Hs Hs 32 31.5 31 28.5 40 35.5 35 32.5 Aim at this number. 6-10-42 43 Auto Switch Series C76 Applicable Auto Switch Auto switch model Lead wire length (mm) Load voltage Indicator light Wiring (Output) Electrical entry Applicable load Type Special function Rail mounting 0.5 () 3 (L) 5 (Z) None

CJP

6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The VP series may be used as either a selector valve, or a divider valve.  It is available in a normally closed or a normally open style. The series is vacuum applicable up to –101.2kPa., VP valve manifold, 3 PORT SOLENOID VALVE, J31,

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The VP series may be used as either a selector valve, or a divider valve.  It is available in a normally closed or a normally open style. The series is vacuum applicable up to –101.2kPa., VP valve manifold, 3 PORT SOLENOID VALVE, J31,

Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)

Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller

Model: 42 (Dual AC), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 5H (ø3/16" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 5 (5m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage

Model: 42 (Dual AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 8L (ø8 Elbow), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

Model: 42 (Dual AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: 4H (ø4 Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &

Model: 42 (Dual AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)

Model: 42 (Dual AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power