ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

SMC Electronic Switch Series Variations

ZSE4 ISE4 ZSE5 ISE5 Detection nozzle: 1.0 Piping: 6 X 4 tubing Supply pressure: 0.1MPa Detection distance: 100m ZSE6 ISE6 Detection nozzle: 1.0 Piping: 6 X 4 tubing 5m Supply pressure: 0.2MPa ZSE3 ISE3 4.0 2.5 Set value 50m 300m 100m 200m GS 2.0 3.5 PS Response time (sec) 1.5 3.0 ISA 1.0 2.5 ZSE1 ISE1 Response time (sec) Piping length 0.5 ZSE2 ISE2 2.0 10m 8m ZSP 50 150 0 1.5 100 200 250

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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Operated Type Fitting Status Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series AK3542 AK4542 N.C. 0.29 0.5 316 SS 125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250

Table of Contents - Tubing

TUB-20 Series PEAPP Series PEAPP Polyurethane Tubing How to Order PEAPP 07 BU 153 Linear low density polyethykene tubing, Industrial grade Length per roll Length 100 (33m) 250 (100m) 500 (153m) 1000 (305m) Symbol 33 100 153 305 Tube O.D.

Stainless Steel 316

Pulling Strength Model Without inner sleeve With inner sleeve TU1208 140 N 500 N TU1065 140 N 450 N TU0805 110 N 250 N TU0604 80 N 180 N TU0425 50 N 160 N Reference: Thrust Force Occurring at 0.8 MPa Model Load TU0425 10 N TU0604 25 N TU0805 40 N TU1065 65 N TU1208 90 N Note 3) Please consult with SMC regarding applicable tube separately.

VCL

Note 3) Vibration resistance Conditions when tested with one sweep 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occurred when tested.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-B30 D-B30J D-B31 D-B31J D-B35 D-B35J Auto switch model 190 250 190 250 190 250 0.5 Lead wire length (m) Auto Switch Internal Circuit 3 368 368 368 D-B30 5 462 462 462 Contacts protection resistance Brown (Terminal 1) Blue (Terminal 2) Contacts (Magnetism detection) Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

In-line Air Filter

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

MLGP

, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Series 12-REA Sine rodless cylinder ø25, ø32, ø40, ø50, ø63

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

FC2W-X110

Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off). Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

Low Maintenance Filter Series FN1/FN4

Symbol 0 1 Cylindrical type (5 m, 20 m) Applicable model Element type FN1, FN4 Nominal filtration rating Step type (5 m) FN1 Element material Symbol Nominal filtration rating Note) Refer to Features 2 for detailed element type. 5 m (Cylindrical type, Step type) Symbol Element material 005 S Stainless steel 304 Element length 20 m (Cylindrical type) 020 Seal material Port size Symbol 1 2 l 250

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)