SMC Corporation of America
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Appendix C: i-Parameters . 103 20. Appendix D: Diagnostic messages for parameter errors for PROFIsafe .. 104 21. Appendix E: Checklists . 105 22. Appendix F: Safety Characteristics. 109 23. Appendix G: EX245-FPS Timing Values . 110 24. Appendix H: Cybersecurity . 111 3 No.EX##-OMY0004 1.

C. welding current is 16,000A. Consult SMC if exceeding 16,000A.

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

A t stop E xhaust the air on the S UP side if the pump w ill be stopped for a couple of hours. C lean inside the pump to avoid clotting of transported liquid and sticking of internal parts if it w ill not be used for a long period of time. C heck & Repair C heck liquid and air leakage, and operation conditions regularly during pump operation.

A t stop E xhaust the air on the S UP side if the pump w ill be stopped for a couple of hours. C lean inside the pump to avoid clotting of transported liquid and sticking of internal parts if it w ill not be used for a long period of time. C heck & Repair C heck liquid and air leakage, and operation conditions regularly during pump operation.

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

(between case and cable) Ambient temperature -10 to 60 C Enclosure IEC 60529 criteria IP67, JISC0920 watertight construction Standard CE/UKCA marked -24No.D-S-OMJ0004-G Dimensions D-M9B(W/E)/D-M9N(W/E)/D-M9P(W/E) D-M9B(W/E)V/D-M9N(W/E)V/D-M9P(W/E)V -25No.D-S-OMJ0004-G Pre-wired connector A B D-M9### PC D-M9###DPC -26No.D-S-OMJ0004-G Revision history A: Standardize each contents for series

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

xchanger A ir O utlet C apacity C ontrol Valve D rain Separator Evaporation Therm om eter D rain O utlet C apillary Tube C ondensor C om pressor Pressure.

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

(75 mm) or less Plate Facility water inlet Rc3/4 (with plug) Circulating fluid outlet Rc3/4 (with plug) REMOTE START/STOP RUN Handle ALARM RESET SEL ENT Circulating fluid fill port Circulating fluid return port for DI filter Note) E S O L C SMC N E P O Circulating fluid level gauge Rc1/4 (with plug) Circulating fluid return port Rc3/4 (with plug) C Ventilation (expiration) Tank drain port

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E