EX500

R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. End lock cylinder, CBM2, Double acting, single rod, 8 mounting options available, Bore sizes: 20mm, 25mm, 32mm, 40mm, Auto switch

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. End lock cylinder, CBM2, Double acting, single rod, 8 mounting options available, Bore sizes: 20mm, 25mm, 32mm, 40mm, Auto switch

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. End lock cylinder, CBM2, Double acting, single rod, 8 mounting options available, Bore sizes: 20mm, 25mm, 32mm, 40mm, Auto switch

NAR Series

C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k (

Thermo-con/Rack Mount Type

Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density g: 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 6 Thermo-con/ Rack Mount Type

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

VQ4000

SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

Pin Cylinders Series CJP2/CJP

Material: Iron d H B C Part no.

ZP3

Lock ring Adapter z c x Pad 165 A

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

RESET input Alarm group C There is no change. There is no change.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

For other commercial connectors, use a type conforming to MIL-C-24308. 561 Plug-in Unit Base Mounted VQ1000/2000 1021Directional Control Valves Air Grippers Modular F. R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

For other commercial connectors, use a type conforming to MIL-C-24308. 561 Plug-in Unit Base Mounted VQ1000/2000 1021Directional Control Valves Air Grippers Modular F. R.

HRX-OM-I051

HRZ Series 8.1 Specification 8-7 HRX-OM-I051 Chapter 8 Appendix Specification for fluorinated fluid (wide temperature with Inverter) Table 8-8 Specification for Fluorinated Fluid (Wide Temperature with Inverter) Model HRZ010-WS Cooling method Water cooled refrigerant Cooling capacity*1 (50Hz/60Hz) kW 10.0 (At 20C) Operating temperature range C -20 to 90 Temperature stability C 0.1*2 Galden

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Pneumatic Transfer System Series MF

a maximum of 152mm. 6 Series MF Dimensions Curved Type 15 32 MF -45 (D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424

JXCx-OMY0004

Caution (1) Do not connect any device other than the specified device (JXC-W2/W2A-C, LEC-W2/W2A-C, LEC-T1).

JXCx-OMT0061CN

B RESET 72 - <>+JOG <>+1-052 B RESET <> 1-096 C RESET <> (1-097) <> C RESET <> <>OFF JOG OFF 1-098 OFF DRV C RESET <>ON SVRE ON DRIVE ON 1-099 <> SETOFF DRV C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.