Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

“JF80-22-150” is the part number of the old floating joint, the J series. The J series (J□, JF□, and JL□) was discontinued in 1990 and became the current JA series. The mounting dimensions of JA series joints are not interchangeable because J series joints were of the compact type.

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

High Vacuum L Type Valve

H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90

XL-OMV0002

H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

PFxx-OMA1007

(page 139) -140No.PF-OMA1007-B Standby regulator type NO specification AMS20/30/40/60B-R/N/F#D Part number P A B C D E J M L AMS20B-#D 1/8 1/4 301.8 214.7 85.1 66.8 25.6 46.2 24 40.1 AMS30B-#D 1/4 3/8 348.3 214.7 102.1 86.5 29.1 46.2 30 40.1 AMS40B-#D 3/8 1/2 395.8 214.9 119.4 91.5 32.6 46.2 36 40.1 AMS60B-#D 3/4 1 491.8 214.8 118 125 42.1 46.2 46 40.1 : Dimension D is the dimension

MGP

mm) J) (J) 12 0.043 8.5 0.23 0.31 16 0.075 9.5 20 0.11 1.9 50 0.91 11.5 3.2 40 0.52 10.5 1 25 0.18 8.4 0.53 32 0.29 10.5 100 4.54 16.5 80 2.71 16.5 63 1.54 11.5 5.2 10.9 16.4 2 2 m M E k + = = 1 4 .. a Ek J M kg m kg ms ms 1 0.5m/s801000.4m/s 2 3 9. 1 2 3 3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS

JCRB-OM00003

E = 1/2 x I x 2 EKinetic energy (J) IMoment of inertia (kg/m2) Angular speed (rad/s) (2) There is a threshold of kinetic energy that a rotary actuator allows. Therefore, by finding the moment of inertia, it is possible to find the threshold value of the rotation time. The basic formula for finding the moment of inertia is shown below.

Rotary Table: High Precision Type

Please refer below for calculation of kinetic energy. 2 ) ( 2 1 O I I E E: Kinetic energy [ J ] I: Moment of inertia of load [ 2 m kg ] Io: Moment of inertia of load [ 2 m kg ] : Angular speed [ s rad ] The following table shows moment of inertia of table. Table 6.

Low-Speed Rotary Actuator

The end angular speed is obtained by: Table 7 Allowable kinetic energy (J) t Size Allowable kinetic energy : Rotation angle [ rad ] : Rotation time [ s ] 10 0.00025 15 0.00039 Kinetic energy E is obtained by: 20 0.025 30 0.048 40 0.081 E Therefore, the rotary actuator rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] Note) If the

IDX-OM-W016

IDFA Series 6-1 Specifications 6 1 IDX-OM-W016 Air dryer6 References 6-3 Dimensions DRAFT AIR OUTLET IDFA3E B Q A E D AIR INLET VENTILATION WITH LAMP SWITCH AIR OUTLET THERMOMETER EVAPORATION G F C DRAFT AIR INLET DRAIN TUBE (O.D.10 LENGTH:0.8m) VENTILATION (820) J TERMINAL BLOCK N L K M H GROMMET POWER SUPPLY ENTRY(17) P Measuremm Model Thread size A B C D E F G H J K L M N P Q IDFA3E Rc3

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

Compact Guide Cylinder

X 0.02 (Pin hole position) (Mounting hole position) X 4 x YY depth YL Section XX Bottom view 4 x OA through 4 x NN through 4 x MM depth ML L 2 x Counterbore diameter OB, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J

1.63

.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.

CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

CM2

CM2 H L 40 F A J 150 Standard DM2 C H L 40 F A J C73 150 With auto switch Rod boot Without rod boot Nylon tarpaulin Heat resistant tarpaulin Bore size 20mm 25mm 32mm 40mm Air cylinder with auto switch 20 25 32 40 Number of auto switches S n J K 2 1 n Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switches.