High Vacuum Angle Valve 1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.
0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 9.5 9.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5 9.5 11 11 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 UB 6 10 10 12 12 VA VB 3 4 4 5 6 L Model MHSL3-32D MHSL3-40D MHSL3-50D MHSL3-63D MHSL3
0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236
Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.
Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.
Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.
Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 41.4 89.8 66.9 M4 x 12 M5 x 25 10 40 * Dimensions after mounting a ring spacer 803 LEFS Series Dimensions: Motor Flange Option Motor mounting position: Motor parallel e w q r PD (I.D.)
orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.
& ' (' ' ) 3 Composite Center of Gravity Calculation m1 & m & > > > & 6.525 kg m X & -m x. & > > > . & 138.5 mm m Y & -m y. & > > > . & 29.6 mm m Z & -m z. & > > > . & 37.4 mm 4 Calculation of Load Factor for Static Load m1+ m m! -$! $ 7 9m. & -. : 0 ) $ # & !9m1max & 9 &0.08 M1+ !# m M1 max -$! -. $ 7 9M1. & -;:!. : M1 & m1 g X & < & -;:!.
KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.
Applicable shaft type: W (mm) (mm) Q1 = M Size Thread M3 x 0.5 Size 40 30 20 15 40 30 20 15 Thread M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 L2 = M5 x 0.8 M5 x 0.8 4.2 4.2 Q2 = M Symbol: A18 Symbol: A17 Shorten the short shaft. A parallel keyway is used on the long shaft for size 40. Applicable shaft type: W Shorten the long shaft.
M N W P1 PE P2 CNP2 P Regeneration option C D Detector CN2 LECSB2-; LECSC2-; LECSS2-; L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N( ) W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector
Foot (M) Stroke CJ2KM 10 16 Z CJ1 H F GA Mounting nut Mounting nut Rod end nut CJP F GB MM NN Cover surface Piping port 2 x M5 x 0.8 NN CJ2 CJ2 LY LB LH JCM KA CM2 LZ LX LT LT Rod section A CM3 Z + Stroke LS + Stroke S + Stroke NB Y X NA Y X 4 x LC Mounting hole CG1 CG3 JMB Refer to page 63 for details of the mounting nut.
Load Blocking Weight and Center of Gravity for Workpiece Y Center of gravity X Workpiece no. Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.
AL B B1 C D E F H1 HX J KA M MM N S W 40 50 63 M8 x 1.25 M8 x 1.25 M10 x 1.25 147 157 173 8 11 11 10 10 10 32 40 40 16 20 20 44 52 64 22 27 27 60 70 86 27 32 32 30 35 35 8 8 8 130.6 133.6 140.6 27 30 31 M14 x 1.5 M18 x 1.5 M18 x 1.5 19.4 16.4 18.4 14 18 18 Up to 500 Up to 600 Up to 600 20Data With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.
AL B B1 C D E F H1 HX J KA M MM N S W 40 50 63 M8 x 1.25 M8 x 1.25 M10 x 1.25 147 157 173 8 11 11 10 10 10 32 40 40 16 20 20 44 52 64 22 27 27 60 70 86 27 32 32 30 35 35 8 8 8 130.6 133.6 140.6 27 30 31 M14 x 1.5 M18 x 1.5 M18 x 1.5 19.4 16.4 18.4 14 18 18 Up to 500 Up to 600 Up to 600 20Data With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.
Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in
Width across flats Effective thread length S ZZ A E F G H1 H MA MB J MM N P V W B C 32 40 50 63 80 100 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 12.2 14.2 19 19 23 27 47 51 58 58 72 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 135 139 156 156 190 190 27 27 31.5 31.5 38 38 up to 500 up to 500 up to 600 up to 600 up to 800 up to 800 46 52 65 75 95