Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Maintenance and Inspection 3.1 Inspection -P. 14 3.2 Maintenance -P. 14 3.3 Replacement Parts -P. 14 4. Troubleshooting -P. 15 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

MRHQ

90 MRHQ25S MRHQ25C 14 25 1560 180 Note) Values do not include auto switch weight.

Digital Flow Switches

Refer to page 14 for details. 22 Series PF2W Flow Characteristics (Pressure Loss) PF2W704T,504T PF2W720T,520T PF2W740T,540T 0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 Flow rate (l/min) 10 12 14 16 2 0 4 6 8 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 Flow rate (l/min) 40 35 30 25 20 15 10

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch

LEC-W_C

No.LEC-OM08004 (ACT Controller) / LEC-W Series 1.3 2.5 3.6 3.1 .6 3.2 .8 4.10 4.1 .10 4.2 .13 4.3 .14 4.3.1 .14 4.3.2 .14 4.3.3 .14 4.4 .15 4.5 .15 4.6 .16 4.7 .16 5.17 5.1 .17 5.2 .20 5.3 .22 5.3.1 .22 5.3.2 .24 5.3.3 .25 5.3.4 .26 5.3.5 .27 5.3.6 .28 5.4 .29 5.4.1 .29 5.4.2 .29 5.4.3.29 5.5 .30 2 - ACT Controller/ 1.

ZK2-C

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

IMPACT BLOW GUN

, G3/8 Supply port 35 IBG11/With adjuster 41 29 Locked: 100.3 Unlocked: 101.7 14 8.5 32 25.5 164.3 14.5 Valve position adjuster Scale setting range: 0 (Fully closed) to 4 (Fully open) Rc1/4 Discharge port 183.8 138.3 138.3 108.3 11 55 30 84.6 37.6 20.5 IBG10_11/With nozzle 35 Rc3/8, NPT3/8, G3/8 Supply port A A Symbol Type Nozzle length Nozzle part no.

VEX-OMY0001

VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved No.VEX-OMY0001

Modular Type Air Filter Series AF

C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

Vacuum Pad with Ejector

Exhaust Characteristics and Flow Characteristics of Ejector 25 14. Troubleshooting 26 15. Non-conformance Examples 27 1 - 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

3 Port Air Operated Valve

/Dimensions Standard/VPA542-1(-F) 02 03 A B 1/4, 3/8 2(A) port 2 x 4.2 (For mounting) 41.1 SYA 1/8 12(PA) port SYJA 26 NC 12 2A VZA 3.5 31 25.6 VFA (1.6) 83 (9) 91 VFRA 2 x 4.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M5 thread) VPA4 (5.4) SYJA 12 46 31.5 4 45 40 (45) 22.5 VZA (50) VTA 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port VGA (Distance between ports) VPA VPA 1P 3R 32

AIR COMBINATION

N.C. type 14 Option / Semi-standard : Select one each for a to j. Option / Attachment / Semi-standard symbol : When more than one specification is required, indicate in alphanumeric order.

AIR COMBINATION

July 2018 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

HRX-OM-I051

Figure 5-31 Initial Setting Screen 3: N/A 5.4 Examples of System Operation HRZ Series 5-14 HRX-OM-I051 Chapter 5 System Operation 5. Use the arrow keys ([], []) to select ALARM1. Figure 5-32 Initial Setting Screen 3: ALARM1 6. Press the [ENT] key. OUT flashes again, and the selection takes effect.

Digital Flow Switch (Integrated display type)

2.8 depth 8.4 PF2M701/702/705/710/725/750-N1(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(

EX500-DX_e

One branch of manifold valves/input unit can be connected to 32 outputs/32 inputs. Up to 4 branches can be connected (total 128 outputs/128 inputs).

VCA

32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5