Manifold Specifications

310.5 300 280 15.5 14 323 312.5 296 13.5 15 333.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

OMR0032

Safety Instructions . 6 2 Product Overview . 8 2.1 Features . 8 2.2 How to order . 11 2.3 Structure of the product . 12 2.4 Start up procedure . 13 (1) Check the contents of the package . 13 (2) Setup of pulse train input signal switch . 13 (3)Mounting the controller . 13 (4) Wiring and connection . 13 (5) Power supply ON and alarm check . 14 (6) Basic parameter setup and Step Data setup

SI Unit for Vacuum Manifold

Table. 3-1 Head modules Head module Number of ejectors connected EX260-VPN1 ( 4) 1...4 EX260-VPN1 ( 8) 5...8 EX260-VPN1 (12) 9...12 EX260-VPN1 (16) 13...16 -15No.EX-OMY0014-A 3.3. Modules The GSD file contains the following modules. The number of occupied bytes of some modules differ by the selected head module.

53

In locations where high frequency occurs. 13. In locations where damage is likely to occur due to lightning. 14.

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

STAINLESS STEEL CYLINDER

Therefore, avoid designs where a single load is moved by synchronizing multiple cylinder operations. 12.Do not disassemble the product or make any modifications, including additional machining Doing so may cause human injury and/or an accident. 8 13.

CRJ

Operation on hydraulic systems can cause damage to the product. 13 Series CRJ Rotary Actuator Precautions 2 Be sure to read before handling. Mounting Warning 8. Attach external stoppers away from the axis of rotation.

PA300/500/700

A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5 1.9/1.8 2.2/2.2 3.4 4.0 3.3/3.5 3.8/3.6 0.31 0.26 0.86 0.99 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13

VVXA21/22

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

VXA21/22

OUT Note 1) Refer to page 17-3-13 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 part (Electroless nickel Piping port POM, SUS304, NBR, C3604 plating), SUS304,

AMH

32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions

ZQ-OM01301

Handling Precautions 37 13. Trouble shooting 38 1 - Doc. No. ZQ-OM01301-A Space Saving Vacuum Ejector Unit/ZQA Series Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

Digital Flow Switch (Remote type monitor unit)

No.PF-OMJ0018-F PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PFM3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Mounting and Installation 13 Installation 13 Wiring 15 Flow Setting 19 Function Setting 21 Default settings 21 F0 Selection of connected sensor Unit selection function 22

MHx-OMM0057

MH*-OMM0057 MHL2-10D* MHL2-16D* MHL2-20D* MHL2-25D* MHL2-32D* MHL2-40D* 1. 23 2. 4 3. 3-1 5 3-2 5 3-3 5 3-4 67 3-5 8 3-6 9 3-7 1012 3-8 13 4. 4-1 13 4-2 14 4-3 15 4-4 16 1 - *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

Ｖ cylinder

Tightening torque Bore size Socket Tightening torque[Nm] 40,50 13 (M8) 7.4 63 17 (M10) 20 80,100 19 (M12) 29 2 4 Tie rod tightening order. 14 3-2-2. Removal of seals 1) Rod seal Insert a precision screwdriver from the front of the cover to pull out the seal as shown in Fig. 4.

Solenoid Valve

Do not remove the name plate. 13. Perform periodic inspections and confirm normal 1. These products are intended for use in general factory EX500/EX250/EX126 Precautions automation equipment.

MRHQ

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101