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(M5 thread) C6 (6) kit VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

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(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Battery-less

series JXCD1 series JXCE1 series JXCP1 series JXCL1 series 16, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32,

Series KG Stainless Steel One-touch Fittings

Nylon Urethane M5 Weight (g) D L1 L2 L3 A M P KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 0.8 29.5 32 36 11 10.4 18.5 24 25.5 4.3 4.3 10 12 21 4 1 8 1 4 27.5 16 10.4 30 26.5 6.0 6.0 30.5 14 M5 0.8 26.5 33 29.5 14 16 23 36 4.3 4.3 13 1 8 29.5 36 32 12.8 21 17 12.8 6 1 4 33 39.5 33.5

CLQ

32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 10 Series CLQ Dimensions/40 Double end tapped: CLQA40

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

CJ2X/CUX/CQSX/CQ2X/CM2X

40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Compact Cylinder with Lock Series CLQ

32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 10 Series CLQ Dimensions/40 Double end tapped: CLQA40

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

CJ2X/CUX/CQSX/CQ2X/CM2X

40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

21

Female Rod End Bore size 20 25 32 40 Bore size (mm) (mm) Bore size (mm) ZZ A1 8 H MM M4 x 0.7 ZZ 88 A 18 AL H 41 ZZ 109 Bore size 20 25 32 40 55 99 M5 x 0.8 20 25 32 40 20 25 32 40 56 103 86 M5 x 0.8 20 15.5 Rc1/8 62 109 90 8 22 20 M5 x 0.8 89 19.5 45 114 Rc1/8 67 125 96 12 22 20 M6 x 1 95 19.5 45 120 109 13 24 21 M8 x 1.25 104 21 50 133 1 Use a thin wrench when tightening the piston rod

Air Slide Table Series MXS

x 18 M6 x 20 M8 x 25 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 4.4 7.0 M2.5 x 10 M3 x 12 M4 x 15 M5 x 18 M6 x 20 M8 x 25 M2.5 x 8 M3 x 10 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Shock Absorber Caution 1.

CNG

40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)