3 Port Solenoid Valve SYJ300/500/700 Series

: Value when used on a manifold Proper Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Blank Plate Ass'y Body ported type (SYJ3 2) Base mounted (SYJ3 4) SYJ300-10-1A SYJ300-10-2A Phillips' head screw SY100-33-3 M1.7 17, Non-gloss nickel plating Phillips' head screw SY100-33-2 M1.7 17, Non-gloss nickel plating Blank plate SYJ300-10-1 Blank plate SYJ300-10-1 P A Manifold

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

AC Servo Motor Driver (MECHATROLINK-II type)

5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

ITV

Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications

PSE550/300

ZSE ISE PSE Z I SE3 Sensor 2 kPa 0 2 kPa 5 kPa 10 kPa Pressure range PS For low differential pressure PSE550 0 2 kPa 0.2 kPa 2 kPa Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rated differential pressure range of sensor Set differential pressure range

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Ejector Valve Unit, Series ZYY/ZYX

Part No. of solenoid for SY3000/SX3000 2.

VKF300

(PT) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65

ISA2

Figure (1) 1.5 2 1 Detection surface 2 or more 2 or more 2 or more 3 or more 3 or more 3 or more 16-8-9 10 Series ISA2 Supply Pressure Dependence The charts illustrate changes in the detection distance with fluctuations in the supply pressure.

KA

Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 X 0.8 M6 X 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 17 KAH04-M5 M5 X 0.8 M6 X 1.0 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 18.5 13.5 KAH04-U01 5 14 10 10 16 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 18.5 KAH06-M5 M5 X 0.8 M6 X 1.0 15 14 4 4 11.5 3 10 KAH06-M6 19 1 8 14.5 KAH06-U01 5 12 6 19.5 17 1 4 13 17 14 12 KAH06

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Coolant Valve

N.O. 5.5 5.7 2 VNC0 VNC02 1 4 10.2 10.4 50 12 (P1) 10 (P2) VNC814-65F VNC811-65F VNC914-80F VNC911-80F 15.7 Air operated 65 1 2 1 2 21.2 80 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

PSxx-OMU0002CN

-2No.PS-OMU0002CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0002CN-D () () () () -4No.PS-OMU0002CN-D () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMU0002CN-D * FG (35 N () () *() 6 33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

5 Port Solenoid Valve Series SV

Characteristics Port size Flow characteristics 14, 2(PA, B) 4, 25, 3(A, BEA, EB) Model 4, 2 (A, B) 1, 5, 3 (P, EA, EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually

Multistage Ejector Series ZL112/212 1

10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Clean Air Module

With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1