VQZ1000/2000/3000

pilot specifications, refer to page 2-7-60.

Large Size Vacuum Module: Series ZR

(ANR)) Suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) 80 80 80 80 ZY Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 70 70 70 ZF 60 60 60 60 Air consumption 50 50 50 50 ZP Air consumption 40 40 Vacuum pressure 40 40 Suction flow Suction flow SP 30 30 30 30 20 20 20 20 ZCUK 10 10 10 10 AMJ Supply pressure (MPa

F/ISE

auto shift input (Brown) DC (+) 1.2K (Brown) DC (+) (Gray) Analog output (Gray) Auto shift input Main circuit Main circuit Main circuit Main circuit Load Load 1k 12VDC to 24VDC Load Load 6.8K 12VDC to 24VDC (Black) OUT 1 (Black) OUT 1 (White) OUT 2 (White) OUT 2 (Blue) DC () (Blue) DC () ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L)-(M) 50 60 50 60 With analog output With auto shift

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

For the wiring to power supply terminal, refer to back page 9. 26 Series SJ2000/3000 PC Wiring System with Power Supply Terminal Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

NCG/CG1

) 63.5 8.5 16.5 10 4 155 (164) + l 40 135 (144) 95.5 + l 55 (67) 50 75.5 11 22 17.5 5 177.5 (189.5) + l 157.5 (169.5) 95.5 + l 104 + l 104 + l 55 (67) 63 75.5 13 22 17.5 5 177.5 (189.5) + l 157.5 (169.5) 80 60 (74) 95 14 28.5 197.5 (211.5) + l 20 5 188.5 (202.5) 100 60 (74) 95 16 201 (215) + l 30 20 7 192 (206) Note) ( ): Denotes the dimensions for long stroke.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

CHKD/CHKG

(Example) The overall length of the cylinder tube for CHDKDB50-60-XC61, is equivalent to 75 strokes.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

Title not found

AF10 to 60 auto drain (N.O.)AF3O to 60 Lubricator Description Applcable Body size 1000cm1lank AL30 to 60 T 0o0cn1l rank with eve swlch (lowest lm 1ON) AL30 to 60 10o0cm1lank with eve sw lch ilowest lm i OFF) AL30 to 60 Metal bowl ALI0 to 60 ALT 0 to 60 Nylon bowl I ncluding slghtdomel ALT 0 to 60 Thread type Mehic rhread ([45) Meta bow wih levelqaLrqe AL30 to 60 AL2O Flow direction: R qht

Modular/F.R.L. Units Series AC

Unit AC20 to 60 (AF + AR + AL) AC20A to 60A (AW + AL) AC20B to 60B (AF + AR) AC20C to 40C (AF + AFM + AR) AC20D to 40D (AW + AFM) Regulator AR20(K) to 60(K) 296 Series Configuration Product Model Port size Page M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Air Filter + Regulator + Lubricator AF AR AL AC10 AC20 AC25 AC30 300 AC40 AC40-06 AC50 AC55 AC60 AC10A Filter Regulator + Lubricator AW AL AC20A AC30A

5-Port Solenoid Valve

SY3000 SY30M-60-1A SY5000 SY50M-60-1A SY7000 SY70M-60-1A Intermediate stop Drop prevention Applicable valve SY 3 5 7400 1 SY 3 5 7 1 2 00 1 With Residual Pressure Release Valve EXH. 2(B) 4(A) 3(EB) 1(P) 5(EA) Circuit diagram (Intermediate stop: When 3-position exhaust center valve is mounted) Vacuum Release Valve with Restrictor Double check spacer assembly with residual pressure release

AC Servo Motor Driver (CC-Link Type ）

5.8.3 Battery installation procedure . 5 -60 6.

C76

15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C76

60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

VP3145/3165/3185

Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz G Grommet Conduit terminal DIN terminal TL D T Note

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table