Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

183 60 21-/2210-/11-/1286 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS32, CXSL32 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment S ZZ SS 38 16 14 2-6.9 through 8 30 1 M10 x 1.5 x 8L 2-11 counter bore depth 6.3 36

Low Profile Guide Type

alloy Stainless steel Aluminum alloy Carbon steel Stainless steel Rolled steel plate Rolled steel plate Aluminum alloy Rolled steel plate Urethane rubber Aluminum alloy Special resin Special resin Special resin Aluminum alloy Carbon steel Type C retaining ring for hole Phosphate coated (15) (10, 25) Type C retaining ring for axis 29 Chromate (Only for 25) Retaining ring 30 31 32 33 34 35 36

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Plug-in Unit

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 2-2-36 Base Mounted Series VQC Plug-in Unit VV5QC41 S Kit (Serial transmission kit: EX240) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port VQC SQ 23 SMC SMC SMC SMC SMC SMC SMC 12 20.5 8 VQ0 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 75.5 61.5 77.5 72 43.5 42.7 VQ4 15.7 (1.5) 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ5 11.5 21.5

Unit Manifold Valve

5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting surface) 32.6 20 (33.7) 31.5 25 2-M2 x 0.4 2-2.2 (For C2) (10) (10) 6 (15) 33.6 36

VXA31/32

Indication of valve type Type indication (Gasket) Blanking plate Mounting hole n-Rc , 8 1 4 1 (Pitch) (Pitch) Stations 2 3 4 5 6 7 8 9 10 Model Symbol L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36

3

Tightening Torque for Piping Leakage current Connection thread Proper tightening torque (Nm) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 Rc1 36 to 38 AC coil: 5% or less of rated voltage DC coil: 2% or less of rated voltage Mounting Warning 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port etc. 1.

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

Manifold Specifications

plate (With spring washer) Individual SUP Spacer Assembly Gasket DXT192-40-2A Round head combination screw Gasket Applicable base VV5Z3-20 VV5Z3-21 Applicable base VV5Z3-20 VV5Z3-20P VV5Z3-21 M2.5 x 40.5 (With spring washer) DXT192-13-3A Round head combination screw Individual EXH Spacer Assembly M2.5 x 7 (With spring washer) DXT192-21-1A Blanking plate Round head combination screw M2.5 x 36

WRF100

Note 3) The symbol F in the dimensions indicates the position where the clamping force is generated defined by the product specifications. 82 WRF100 Dimensions WRF-S/S-type clamp arms (Without cover) WRF100-S200/S240 4 x M8 x 1.25 depth 12 108 60 2 x M12 x 1.75 through 25 25 80 0.015 0 2 x 8H7 ( ) 60 0.05 depth 12 (2 x 4 x M5 x 0.8 through) ( ) C B For limit switch mounting A 60 60 36 0.5

Compact and Lightweight

ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

Counter/Extension Cable

UP 10-12-36 Counter CEU FUNC. FUNC. DOWN SEL. key 3-3 Stop output The setting mode for stand-by time until stop output is commanded is selected by pressing the SEL key while STOP is flashing. Set numerical values with the direction keys. The unit is 0.1 sec. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP RE A B DOWN REC FUNC.

ML2B

operation port) HH 9 N K M 1 Cushion needle O H FF PP L DD EE DDEE L NN MM NN MM 2-PA 2-PA LL KK CC CC (Hexagon socket head taper plug) (Hexagon socket head taper plug) KK LL J A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36

NCQ8

1-1/4 to 2"st 1/4" to 1"st W R Q P O N M2 M1 K J I H E D Z 150 (1-1/2") 200 (2") 250 (2-1/2") 0.63 0.50 0.70 1.88 2.00 1.25 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 2.19 0.56 NPT1/8 0.75 0.70 1.81 2.53 1.19 1/2-20UNF 3.13 0.20 0.63 1.90 2.69 0.22 0.34 0.25 0.20 2.73 0.56 NPT1/8 0.75 0.70 2.31 2.84 1.44 1/2-20UNF 3.75 0.39 0.63 2.30 3.25 0.28 0.41 0.33 0.26 3.23 0.69 NPT1/4 36