INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Proximity Switch Specifications Part number CKZ25-36-133NN-R Manufacturer SENSTRONIC Wiring Diagram (PNP Connection Circuit) Power supply voltage 10 to 30 VDC Black Output N.O., PNP S1 Load (Unclamping side) Continuous load current 100 mA Blue () Enclosure IP67 2 3 1 4 Housing material Aluminum alloy S2 Load (Clamping side) (+) Brown White Output indication Clamping side: Red Unclamping side

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5

Series 10-MGF ø40, ø63, ø100 Guide Table

Maximum tightening torque (Nm) L (mm) Model Bolt M8 x 1.25 MGF40 18 8 M10 x 1.5 MGF63 36 10 M12 x 1.75 MGF100 65 10 847

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72 94 112 E 26 42 60 D 67 83 101 B C 36

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29 11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

183 60 21-/2210-/11-/1286 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS32, CXSL32 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment S ZZ SS 38 16 14 2-6.9 through 8 30 1 M10 x 1.5 x 8L 2-11 counter bore depth 6.3 36

Low Profile Guide Type

alloy Stainless steel Aluminum alloy Carbon steel Stainless steel Rolled steel plate Rolled steel plate Aluminum alloy Rolled steel plate Urethane rubber Aluminum alloy Special resin Special resin Special resin Aluminum alloy Carbon steel Type C retaining ring for hole Phosphate coated (15) (10, 25) Type C retaining ring for axis 29 Chromate (Only for 25) Retaining ring 30 31 32 33 34 35 36

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Plug-in Unit

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 2-2-36 Base Mounted Series VQC Plug-in Unit VV5QC41 S Kit (Serial transmission kit: EX240) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port VQC SQ 23 SMC SMC SMC SMC SMC SMC SMC 12 20.5 8 VQ0 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 75.5 61.5 77.5 72 43.5 42.7 VQ4 15.7 (1.5) 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ5 11.5 21.5

Unit Manifold Valve

5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting surface) 32.6 20 (33.7) 31.5 25 2-M2 x 0.4 2-2.2 (For C2) (10) (10) 6 (15) 33.6 36

VXA31/32

Indication of valve type Type indication (Gasket) Blanking plate Mounting hole n-Rc , 8 1 4 1 (Pitch) (Pitch) Stations 2 3 4 5 6 7 8 9 10 Model Symbol L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36

3

Tightening Torque for Piping Leakage current Connection thread Proper tightening torque (Nm) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 Rc1 36 to 38 AC coil: 5% or less of rated voltage DC coil: 2% or less of rated voltage Mounting Warning 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port etc. 1.

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

Manifold Specifications

plate (With spring washer) Individual SUP Spacer Assembly Gasket DXT192-40-2A Round head combination screw Gasket Applicable base VV5Z3-20 VV5Z3-21 Applicable base VV5Z3-20 VV5Z3-20P VV5Z3-21 M2.5 x 40.5 (With spring washer) DXT192-13-3A Round head combination screw Individual EXH Spacer Assembly M2.5 x 7 (With spring washer) DXT192-21-1A Blanking plate Round head combination screw M2.5 x 36