Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input
Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 30mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input),
Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 100mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input
Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 50mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 2m, Driver: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O
Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 150mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input
Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: -
Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)
Function: 5 (3 Position Pressure Center), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)
Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 2 (200VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)
Function: 4 (3 Position Exhaust Center), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 6 (12VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)
Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 1 (100VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)
Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)
Actuation: 2 (2-Position Double), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)
Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)
Actuation: 4 (3-Position Exhaust Center), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: Rc, Bracket: F2 (w/Side Bracket)
m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)1100PolycarbonateStandard (Polycarbonate)Relieving type1.26
m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)1100PolycarbonateStandard (Polycarbonate)Relieving type1.26
m, AFM: 0.3 ?m (99.9% filtered particle size)330MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)PolycarbonateStandard (Polycarbonate)Relieving type0.65
m, AFM: 0.3 ?m (99.9% filtered particle size)330MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)PolycarbonateStandard (Polycarbonate)Relieving type0.65
m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)450PolycarbonateStandard (Polycarbonate)Relieving type0.67