Electronic Pressure Switch Series (Separate Type)

Adsorption Confirmation 2 Sensor installed close to the pad (No. 2) 1 Sensor installed close to the pad (No. 1) Series PSE54 + PSE200 Series PS1100 16-3-23 16-3-1 16-5-1 Pad adsorption can be confirmed easily. Response delays, caused by piping, will not be a factor due to the close proximity of the sensor to the pad.

ZSE3/ISE3

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE3 Vacuum Q CE marked products Note) Only available with output specifications 21 and 23.

SYJA3000

(Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R P 10 (Mounting holes for manifold) 2.6 237.5(Mounting holes pitch) 19 4 43 15 70.5 48 17.5 70.5 (Non-locking) Manual override 24.5 20 23 11.5 (Mounting holes) 2.6 211 4-Rc(PT)1/8 (Non-locking) Manual override 33.5 (Piping port) 5-M5 X 0.8 21.5 2-1.8 (Bleed port) With filter (80 Mesh) (Piping

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

FGX-OM-L011

4 1 V 2 6 [] 23 6/8 FGX-OM-L011 5 1 INLETOUTLET O (1)(2) (2) AL-25S(:NBR) AL-22S(:FKM) (1) 2 3 23 7/8 FGX-OM-L011 4 O O 1 2 (1) (2) 5 (a)(b) V [(c)] [(c)] O 1 V V V V O (a) V (b) V (c) 6 8/8 FGX-OM-L011 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject

3 Port Air Operated Valve Series SYJA300 1

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A, R port) M5 x 0.8 23

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Series SYJA300 3 Port Air Operated Valve

F) Base Mounted: SYJA5l4-01 18 2-2.6 15.5 (Mounting holes for manifold) 24 8.5 A 2.5 15 11 1 13 8.5 SlA M5 X 0.8 34 (External pilot style) (Pilot port) (For solenoid valve) VlA 2-4.5 Manual override (Non-locking) (Pilot port) (Mounting holes) M5 X 0.8 34 2-3.5 Manual override (Mounting holes pitch) (Mounting hole) (Non-locking) 10.6 9 8 A 1 SlA 32 24 15 X 18.6 R P 14.5 3 24.5 30 11.5 37 23

4/5 Port Air Operated Valve SYJA3000 Series

6 P R1 17 17 15 8.5 15 SYJA R2 45.5 24 1/8 (Piping port) 21 1.3 (Breathing port) 32 VZA VTA 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23

Pressure Switch/Reed Switch Type

23 mm mm 23 mm 15 mm 15 5 mm mm RoHS Pressure switch with spacer Pressure switch with piping adapter Set Pressure Range Specifications Electrical Circuit Up to 100 V AC/DC ON pressure OFF pressure Model IS10-01 Air/Inert gas 0.5 Fluid Hysteresis Reed switch Operating pressure (MPa) 1.0 MPa Proof pressure 0.4 0.7 MPa Max. operating pressure 0.1 to 0.4 MPa Option: 0.1 to 0.6 MPa 0.3 Set pressure

EX9-PE1-X15/X22/X23/X24

External power supply 1: 20 mA or less, External power supply 2: 20 mA or less Power supply Outputs 0 to 3: External power supply 1 (PWR1) Outputs 4 to 7: External power supply 2 (PWR2) Outputs 8 to 11: External power supply 1 (PWR1) Outputs 16 to 19: External power supply 1 (PWR1) Outputs 24 to 27: External power supply 1 (PWR1) Outputs 12 to 15: External power supply 2 (PWR2) Outputs 20 to 23

AS

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1 output + analog voltage 100 to 100 kPa/NPN open collector 2 outputs 100 to 100 kPa/PNP open collector 2 outputs 100 to 100 kPa/NPN open collector 1 output + analog voltage 100 to 100 kPa/PNP open collector 1 output + analog voltage Specification ZQ1-ZSEA--A ZQ1-ZSEB--A ZQ1-ZSEC--A ZQ1-ZSEE--A ZQ1-ZSFA--A ZQ1-ZSFB--A ZQ1-ZSFC--A ZQ1-ZSFE--A 6 Series ZQ Dimensions Type K1 ZQ1 1U-K1 5 6 23

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