SMC Corporation of America
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Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch

delay time at ON 9 Set OUT1 delay time at OFF 10 Display colour setting 11 Output mode setting of OUT2 12 Reversed output setting of OUT2 13 Pressure setting of OUT2 14 Hysteresis setting of OUT2 15 Set OUT2 delay time at ON 16 Set OUT2 delay time at OFF 17 Display colour setting 18 Digital filter setting 19 Auto-preset function 20 Fine adjustment of display value 21 Sub display setting 22

Vacuum Pressure Gauge Specifications 22 - Document No.ZL-OM01001-A Digital Vacuum Pressure Switch Specifications CE/UKCA, RoHS compliant A Note 1) If the applied voltage fluctuates around the set value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur.

No.PS-OMU0003-D PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20A(F) ISE20A Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 15 Installation 15 Piping 17 Wiring 19 Outline of Settings [Measurement mode] 22 Pressure Setting 23 3 Step Setting Mode 24 Simple

Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600

Specification 22 12. Circuit examples 24 13. Exhaust Characteristics and Flow Characteristics of Ejector 25 14. Troubleshooting 26 15. Non-conformance Examples 27 1 - 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Please turn off the EMG terminal when energizing to the BK RLS terminal at motor drive power is OFF. 22 - 6. CN5: Parallel l/O Connector 6.1 Parallel I/O specifications * Input specifications * Output specifications No. Item Specification No.

Element assembly Snap fit Two places Pull up Element Baffle Bowl assembly 22 AF20A Step 1 Step 2 The element is attached to the deflector, and fixed into position in the direction shown. When the element assembly is attached to the bowl assembly, the snap fit of the deflector is attached to the bowl assembly.

(mm) Connection tubing size TLM TILM Standard size 3.0 4.0 6.0 8.0 10.0 12.0 19.0 25.0 3.18 4.75 6.35 9.53 12.7 19.0 25.4 31.75 38.1 Tolerance Standard size Tolerance 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" 1 1/4" x 1.1" 1 1/2" x 1.33" 0.06 0.5 TD TID +0.2 0.1 Metric sizes TH TIH 0.1 1.0 a

diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa Kv 169.7 43.7 131.1 18.8 71.1 8.5 Flow rate characteristics Cv 198 51 153 22

Contents Model CX2N10-PS CX2N15-PS CX2N25-PS CX2N10 CX2N15 CX2N25 CX2N10-PS CX2N15-PS CX2N25-PS @0 @1 22 @3 Rod seal Set of left nos. @0, @1, @3 22 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Piston gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)

Contents Model @0 @1 22 @3 NBR Cylinder body Rod seal 22 is a non-replaceable part, so it is not included in the seal kit. NBR CXWM10-PS Piston seal CXWM10 CXWM16 CXWM25 CXWM10-PS CXWM16-PS CXWM25-PS Set of left nos. @0, @1, @3 CXWM16-PS NBR Piston gasket CXWM25-PS NBR Cylinder tube gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size.

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A MGZ25-PS Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.

When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174

distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) *1 0 to 60 *4 10 to 300 *4 30 to 500 *4 Minimum display unit (Distance reference) *1 1 Rated pressure range 100 to 200 kPa Displayable range (Pressure value) *2 20 to 220 kPa Withstand pressure 600 kPa Detection nozzle 1.5 *3 Consumption flow rate 5 L/min or less 12 L/min or less 22

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22