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Series NCY2S Model Specifications l MPa=10.1972k9flcm' Prool pressure 152 psi 101 psi Ambient and fluid 14-140'F {-10-+60'C 2-1 6 irvsec {50-400mm/s} Cushion Urethane cushion at both sides Lubrication Nonlube Stroke tolerance 0-9.9st:rb**, 1 0-39.4st:1b*, 39.sst-:l Horizontal r Whon senjng an aulo swiich (in case ol NCDY2S) ailhe intsrmodials poilion, th6 d6lctable max. pislon sPeed is subjct

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2019 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing AA printing AA 0AA Printed in Japan. D-G

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

ZSE2-01-15CN1 pc. 30 3 m ZS-10-5 A-501 pc. 50 5 m 780 Compact Pressure Switch Series ZSE2/ISE2 Specifications ZSE2 For vacuum 0 to 101 kPa ISE2L For low pressure 0 to 100 kPa ISE2 For positive pressure 0 to 1 MPa Model Rated pressure range/Set pressure range Proof pressure Fluid Power supply voltage Current consumption Response time Repeatability Air/Non-corrosive, non-flammable gas 1.5 MPa

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing NX 12200SZ Printed in Japan.

3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101

to 5 V) 22 0XY With suction filter M6 x 1 (Option) NPN open collector 1 output Failure predict function without analog output Note 2) Single mounting type: M5 x 0.8 female threaded. 23 NPN open collector 1 output Failure predict function with analog output (1 to 5 V) 24 765 Series ZSE3/ISE3 Specifications Vacuum ZSE3 Positive pressure 100 kPa ISE3L Positive pressure 1 MPa ISE3 Model 0 to 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MW printing MW 16400DN Printed in Japan.

Port Solenoid Valve Body Ported Series VZ1000 Type 20 Manifold VV4Z1-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53 40 69 56 4 85 72 5 101

female thread) NPT1/8 (With M5 female thread) M5 x 0.8 female thread G1/8 6 one-touch fitting 4 one-touch fitting Rc1/8 Port size Sensor pressure receiving area Silicon Material of parts in contact with fluid ZDC2, POM, Stainless steel 304, C3604 (Electroless nickel plated) O-ring: HNBR C3602 (Electroless nickel plated) O-ring: HNBR ZDC2 O-ring: HNBR Piping port Weight 78 g 79 g 97 g 104 g 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QQ printing QQ 7850SZ Printed in Japan. D-DN

3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101

Symbol Specifications/Description Intermediate stroke Rod-end female thread Change of angle adjustable range Long Stroke (101 to 200 mm) MSQ X1 X2 X5 X10 Linear Motion Parts/Standard Stroke MSZ 32, 40 Standard stroke (mm) Size 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 CRQ2X MSQX Refer to page 352 for other intermediate strokes.

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101

energy Rubber bumper 0.02 J 0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Symbol Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J Air cushion Double acting, Single rod Standard Strokes Bore size [mm] Standard stroke [mm]*2*4 Max. stroke*3 [mm] 8*1 10, 25, 40, 50, 80, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101