MLGP

Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

lock 128 132 132 156 Front lock 142 146 148 179 20 25 32 40 Clevis Rear trunnion Bore size (mm) Z ZZ Double lock 139 143 143 167 Z ZZ Double lock 163 167 167 201 Double lock 129 133 133 156.5 Rear lock 143 147 147 182 Rear lock 118 122 122 148.5 Rear lock 128 132 132 159 Rear lock 152 156 156 193 Front lock 144 148 150 185 Front lock 119 123 125 151.5 Front lock 129 133 135 162 Front lock 153

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Refer to L1 dimension on pages 153, 162 and 172 for lengths that correspond to the number of manifold stations. 175 Series SY9000 23 Type 23P Type How to Increase Manifold Bases (Series SY9000 only) Manifold case can be added at any location. When a type 23 manifold base is added, tension bolts as well as manifold block assembly will be required.

MY1

LL 40 50 55 70 85 PG 3.5 4.5 7 8 9 HG 13.5 17.5 21 26 33.5 JJ M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 M 6 8 9 12 12 PA 40 50 60 80 100 N 20 25 30 37 45 NC 13.5 17.5 20 25 30.5 NE 27.8 34 40.5 50 63 NG 13.5 17.5 28 33 42.5 NH 27 33.5 39 49 61.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 PB 20 25 30 35 40 PC 40 50 55 70 85 PD 4.5 5 6 10 12.0 Q 153

MY1

0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV XX YH YW Z NH PA PB PG Q PP QW QQ RR SS TT UU WW Model 40 20 3.5 153

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

Digital Flow Switch (Integrated display type) ( compatible)

(with 500 VDC) between the terminals and housing Standards and regulations CE/UKCA marked, UL (CSA) PPS, SUS304, FKM, SCS13 PPS, SUS304, Material of fluid contact parts FKM Grease free Piping port size 8 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 11/4, 11/2 Flow switch only 153 g 171 g 228 g 720 g 890 g With temperature sensor 166 g 184 g 248 g 748 g 1075 g With flow adjustment valve 241 g 259 g 429 g

CRQ2

BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153

MLGP

Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153

Compact Cylinder

7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72 90 100 126 150 M5 M5 M6 M6 M8 M8 M10 M10 32 36 45 50 63 75 68 73 79 90 110 120 153

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 4-4-29 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

When power is supplied, alarm for AbEnc ID ALM /code: 1-153 is generated. 1) Combination of the controller Combination at the time of shipment and actuator is not correct. shall be kept. 2) The product is used for the This is normal. Turn ON RESET to reset the alarm. first time, or when the actuator or controller is replaced. Input the reset signal.

CRQ2

BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153

Plate Cylinder

Operating direction Size 0.7 0.6 0.5 0.4 0.3 0.2 Secondary Primary 25 32 40 50 63 25 32 40 50 63 12 14 16 20 20 12 14 16 20 20 30 314 265 216 166 117 68 491 OUT 15 42 521 440 360 280 199 119 804 OUT 24 Spring return 56 824 698 573 447 321 195 1257 OUT 30 76 1327 1131 935 738 542 346 1963 OUT 47 113 2069 1757 1446 1134 822 510 3117 OUT 61 30 235 197 159 121 83 46 378 IN 15 42 413 348 283 218 153

Table of Contents

Optional specifications ( 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 14-2-21 22 F.R.L.

Table of Contents

rod end connection Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P O A 75, 100 125, 150 200, 250 300 63 100 66 180 135 117 65 228 60 M12 234 135 12 14 180 158 250 228 25 25 M12 x 1.75 depth 23 Rc 1/4 Rc 3/8 Rc 1/2 200 80 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 M12 x 1.75 depth 28 230 100 125 80 245 190 153

Stability of suction position,

A B ZP3EB-T2JB10 58 128 ZP3EB-T2JB30 83 153 ZP3EB-T2JB50 103 173 Buffer Assembly (Vacuum inlet: Lateral) Part no. ZP3EB-Y1JB10 [Weight: 170 g] ZP3EB-Y1JB30 [Weight: 186 g] ZP3EB-Y1JB50 [Weight: 196 g] Part no.

Dual Rod Cylinder Series CXSJ/CXS

25 9 10 Z 20 (25) 2 x R 3.5 2 x 4.3 through 2 x 8 counterbore depth 4.4 12 1 18 45 0.2 45 0.2 56 25 6.3 48 58 2 x R 3.5 8 5 1 12 9 4 x M4 x 0.7 thread depth 6 2 x 2 x M5 x 0.8 (Through-hole) (Z) (25) 25 2 x 2 x M4 x 0.7 thread depth 5 (Opposite side: Same) (mm) 5 10 Z ZZ SS S Model CXSW15-10 CXSW15-20 CXSW15-30 CXSW15-40 CXSW15-50 CXSW15-75 CXSW15-100 CXSW15-125 CXSW15-150 10 105 153

Lightweight and Compact

IDH Anchor bolt fixing position 1015 (Dimension of anchor bolt fixing bracket) 4 x 15 (Thermo-chiller dimension) (377) 173 102 Facility water outlet Rc1/2 597 (970) (Thermo-chiller dimension) 28 Facility water inlet Rc1/2 354 View A 208 Accessory: Y-strainer mounting view For water-cooled type Mount it by yourself on the circulating fluid return port. 153 Circulating fluid return port Rc1

Title not found

0.195 0.220 0.250 1/16 0.300 0.420 0.517 0.595 0.660 0.725 0.780 0.880 1.00 1/8 1.2 1.68 2.06 2.37 2.64 2.89 3.12 3.53 4.04 1/4 4.8 6.7 8.3 9.5 10.6 11.6 12.4 14.0 16.2 3/8 10.8 15.2 18.5 21.4 23.8 26.0 28.0 31.8 36.4 1/2 19.1 27.0 33.0 38.5 42.3 46.3 50.0 56.5 64.6 5/8 30.0 42.2 51.7 59.5 66.2 72.6 78.0 88.0 101 3/4 43.0 60.6 74.0 85.3 95.2 104 112 127 145 7/8 58.8 82.6 101 116 130 142 153