Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 07 (One-touch Fitting ø1/4")

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16")

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16")

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)

Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07), Port Size: 01 (Rc1/8, Female Thread)

Size: 3 (1/8 Basis), Tube Size: 07 (Ø1/4"), Exhaust Port: 07 (Ø1/4")

Size: 2 (M5 Basis), Tube Size: 07 (Ø1/4"), Exhaust Port: 07 (Ø1/4")

Air Preparation Equipment

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

Vacuum Ejector with Solid State Timer, Series ZMA

Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Manifold Specifications

(Example) VV5Z3-43P-07-C41 pc. (Manifold base) VZ3143-5MOZ 3 pcs. (Valve) VZ3243-5MOZ 3 pcs. (Valve) DXT192-13-3A1 pc. (Blanking plate assembly) DXT192-52-1-4A3 pcs. (Connector assembly) DXT192-52-2-4A3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

Parallel Type Air Gripper Series MHZ

Note: 1g = 0.0353oz Options Body options/End boss type Single acting type, normally closed Symbol Piping port position Applicable model Double acting Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Single acting Standard Side ported Nil E K H M Axial port 2 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Construction/Standard

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Clean Room Rodless Cylinder Series CYP ø15, ø32

Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Symbol Bore size Applicable series Unified thread (10-32 UNF) NPT N G F Symbol Specications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread.

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6