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B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.

Black: N.O. 34 10 one-touch fitting O F Combination of D: With auto drain (N.O.) and H: For medium air pressure D I L T (Accessory) Bracket 20 N K J 1/4 female threaded M U V Option E B J: Drain guide 1/4 female threaded IN OUT C H A 20 1/4 female threaded S, U: With differential pressure switch (with indicator) Y Drain Z G M5 IN OUT Maintenance space T: With element service indicator W X

No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa

IS*-OMX0095-B PRODUCT NAME Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter MODEL / Series / Product Number IS10M-(20,30,40,50,60)(-1,6,L,P,Z)-D IS10T-(20,30,40,50,60)-(F,N)(-6,L,P,Z)-D IS10L-(20,30,40,50,60)-(F,N)(-6,L,P,R,Z)-D IS10E-(20,30,40,50,60)-(F,N)(-6,L,P,R,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Extension locking Retraction locking F B Applicable auto switches Lead wire length (m) Auto switch model Electrical entry direction Load voltage Indicator light Special function Wiring (output) Electrical entry Type 3 (L) 5 (Z) Applicable load In-line 0.5 (Nil) DC AC Perpendicular Z76 3 wire IC circuit 5V P P Yes Z73 12V 100V P P P Reed switch Grommet Relay, PLC 2 wire 24V 5V 12V 100V or

type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74

Positioning complete signal 19 OZ+ Z Z 10 20 COIN OZ+ 14 GND VDC 12 to 24V 13 4.7k COM Torque monitor: Zout 4.7k 12 + IM VDD 30V max. 15mA max. 11 Speed monitor: Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND.) 26 FG CN I/F 205 Non-standard Motor Compatible Drivers Mitsubishi Electric Corporation Drivers for LJ1, LG1, LX Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5

Contents 6 2 pieces each of No.12 and 13 MXPJ6-PS 166 166 Precision Air Slide Table Series MXP Dimensions 6 MXPJ6 Scale:100% 4-M30.5, 3 deep 7 5 H 3 D B 18 10.05 3.5 16.5 14 13 20 6 6 F 6 5 2-M40.7 Bottom hole diameter 3.3 Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6

Impingement frequency 15 The impingement frequency of gas molecules on a unit surface area is Z=3.53 x 1022P/(MT)1/2 collisions/sec cm where M is the quantity of molecules, T is the absolute temperature (K), and P is the pressure. In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41

When entering the range, the alarm is released automatically 7 For HRR050 400V type 8 For HRR050 400V air-cooled type 9 Not generated for option Z and Z1. However, with HRR012 to 030 option T1 and HRR050 400V, it occurs at 7L / min or less for models including Z and Z1. 3.13.7 Data instruction information Instruction information set in the Data instruction is displayed.

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Solid state auto switches marked are produced upon receipt of order. Since there are applicable auto switches other than listed, refer to page 258 for details.

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

A A Z XB 1A 3 5 Example) VXS2 Z Electrical option Special electrical entry direction With bracket Other option 221 VXS Series Installation options (Mounting option/Special electrical entry direction) The following shows combinations that can be selected using installation options.

Y Flange mounting surface X TCP Z JMHZ2-16D-X7400B-DTP JMHZ2-16D-X7400B JMHZ2-16D-X7400B -HC10 -HC10DT Center of X Y Z X Y Z X Y Z gravity(mm) 2.4 0.0 42.6 -0.4 -0.8 48.4 -0.4 -0.8 47.4 Tool center point(TCP) X Y Z X Y Z X Y Z 0 0 135 0 0 159 0 0 158 17 - 4Product Specifications * For detailed specifications not included in this document, please refer to the our website (www.smcworld.com)

H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1

How to order lead wire length (Example) L D-F9P Specifications Nil Lead wire length 0.5 m 3 m 5 m L Z CD-P11 CD-P12 24 VDC 50 mA 200 VAC 12.5 mA 100 VAC or less 25 mA Part no.

VK Electrical circuit (With energy-saving circuit) How to Order Red (+) VZ Diode Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M3 T L Z 1 Coil SY1 3 5 LED Timer circuit Body ported VT 4 5 T M Z 1 Black () SY1 1 2 VP Base mounted 1: Starting current, 2: Holding current