Table of Contents

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Load-side encoder initial communication error 1 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB 70.E Load-side encoder initial communication Process error 5 DB 70.F Load-side encoder

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Electric Actuators

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Modular F.R.L. Units

147.1 18 35.5 38.4 40 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 155.6 153.9 149.6 154.1 169.6 174.1 AF40-06-A 3/4 75 149.1 20 35.5 38.4 40 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 157.6 155.9 151.6 156.1 171.6 176.1 AF50-A 3/4, 1 90 220.1 24 45 30 45 70 66 35 11 13 90 3.2 47 259.9 228.6 226.9 222.6 227.1 242.6 247.1 AF60-A 1 95 234.1 24 47.5 30 47.5 70 66 35 11 13 90 3.2 47 273.9 242.6 240.9

Environment

100 50 70 12 70 20 1.3 85 15 0.8 LEY25 LEPY LEPS 40C 140 Lead 3: LEY25AC LER 120 LEY25 Lead 6: LEY25AB 100 Lead 12: LEY25AA 500 LEH Force [N] 80 Lead 3: LEY25C 400 60 LEY -X5 Lead 6: LEY25B 40 Force [N] Lead 12: LEY25A 300 11LEFS 20 200 20 30 40 50 60 70 80 90 100 0 11LEJS Set value of pushing force [%] 100 Max. 95% Max. 65% Ambient temperature Set value of pushing force [%] Duty ratio

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Free Mount Cylinder

(g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 70 80 90 100 33 (38) 36 (46) 40 (50) 43 (53) 46 (56) 50 (60) 57 (67) 64 (74) 71 (81) C(D)UKW6-D 51 (56) 56 (66) 60 (70) 65 (75) 69 (79) 74 (84) 83 (93) 92 (102) 101 (111) C(D)UKW10-D 84 (109) 91 (121) 98 (128) 105 (135) 112 (142) 119 (149) 133 (163) 147 (177) 161 (191) C(D)UKW16-D 150 (185) 163 (203) 177 (217) 191 (231) 205 (245) 219 (259) 247

CY1

CY1S15, 20 to 40 (mm) J x K GP G FB A L B C D d EA EB FA H HA HG HP HT HS HB Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M6 x 1.0 x 9.5 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M8 x 1.25 x 10 12.5 14 8 33.6 20 8

Integrated Controller

The load factor for each direction can be found as follows. x = 0/350 = 0 y = 50/250 = 0.2 z = 200/1000 = 0.2 5. x + y + z = 0.4 1 1000 1000 Lz 1000 800 800 800 600 600 600 L2 [mm] L3 [mm] L1 [mm] 400 400 400 Lx Ly 200 200 200 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 15 Easy to Operate Model Selection EQFSH Series

5 Port Solenoid Valve Series SY3000/5000/7000/9000

L Dimension 66 923 67 935.5 68 948 69 960.5 70 973 71 985.5 No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

initial communication 0 1 1 0 Load-side encoder initial communication Transmission data error 3 error 1 70.7 DB Load-side encoder initial communication Incompatible encoder (Note 6) 70.8 DB 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side

Electric Actuators

80% 90% 100% Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 80 70 10 5 LEPY10 (Basic) 100 50 LEPY10L (Compact) 13.5 11.2 11.2 9.0 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) 9.0 6.7 Force [lbf] Force [lbf] 6.7 4.5 Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 4.5 2.2 2.2 0 0 50% 60% 70% 80% 90% 100% 60% 70% 80% 90% 100% Set value of pushing

Basic type / Direct mount type Series CY3B/CY3R

C Q + Stroke (mm) J x K A L B C D d EA EB FA H HA HG HP HT HS HB GP G FB Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 M6 x 1.0 x 9.5 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M8 x 1.25 x 10 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M10 x 1.5 x 15 12.5 14 8

LEC-OM07605CN

(4) (4) ABZ ( PSEL) LECSS2T (5) (5) 4 4 4 (6) (6) LECSS2T (7) (7) (8) (8) 8 44 8. 70 1 70.5 (1) ABZ AB (PA,PAR,PB,PBR) LECSS21 T (2) (2) [AL. 70.1] LECSS2T (3) (4) (5) 70.6 (1) ABZ Z (PZ,PZR) LECSS22 T (2) (2) [AL. 70.1] LECSS2T (3) (4) (5) 70.7 [AL. 70.1] 3 70.A LECSS2T (2) (1) 1 (2) (3) (3) 70.B [AL. 70.A] 2 70.C 3 70.D 4 70.E 5 70.F 6 8 45 8. 71 1 71.1

240

or less 100 70 30 3 100 15 1 LEC 11.

MY1

Refer to page 8-11-59. 1500 Max. operating frequency (cycle/min) 70 80 10 25 45 1.96 4.22 6.86 8.34 8.83 Extended Spring force (N) 4.22 6.86 15.98 20.50 20.01 Retracted Operating temperature range (C) 5 to 60 Made to Order Specifications (For details, refer to page 8-31-1.)

Refrigerated Air Dryers Series IDF/IDU

464 190 558 70 88 276 88 1028 190 1332 464 190 472 220 180 220 180 448 83 70 590 8 Series IDF100FS/125FS/150FS Options Refer to How to Order page 2 for optional models.

Industrial Filters

x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 x L500 65 x L250 65 x L750 65 x L250 65 to 70 x L250 65 x L250 65 to 70 x L250 Element size Cover Stainless steel 304 Case Stainless steel 304 Main materials Gasket Fluororesin Fluororesin Fluororesin O-ring NBR FKM Legs SS400 (Chromatic plating) Weight (kg) 10 13