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Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1

W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70 85 85 85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA

Compressed air inlet Evaporation thermometer Compressed air outlet Cooler re-heater Ball valve Capillary tube Auto drain High pressure switch Condenser Volume control valve Fan motor Pressure switch Drain outlet Accumulator Compressor for refrigeration Dimensions IDFB60, 70, 80, 90 Compressed air outlet Port size Compressed air inlet Port size G A E B D J C F Drain tube outlet [Thread symbol

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

1 () [] -3No.PF-OMN0011CN-C () () () () -4No.PF-OMN0011CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 -5No.PF-OMN0011CN-C * 15 FG (30 N * () 6 33 () () 10 m DC(-)() -6No.PF-OMN0011CN-C * () () CE -7No.PF-OMN0011CN-C * 3 2161 LCD * -8No.PF-OMN0011CN-C PF3W3 0 () A : OUT1 OUT2 A NPN NPN B PNP PNP C NPN 1~5 V D NPN 4~20 mA E PNP 1~5 V F PNP 4~20 mA G NPN H PNP J

. -10No.LFE*-OMZ0012 Model Indication and How to Order LFE Z Isolation Specifications Symbol OUT2 Rated flow range Symbol Content Nil Not isolated 1 0.5 20L/min Z Isolated 2 2.5100L/min 3 5200L/min Output Specifications Options Symbol OUT2 Symbol Lead wire and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor)

Size/Valve Type: C (20A, N.O.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size/Valve Type: 4 (Size: 10A, 15A; Valve Type: N.C.), Body/Port/Orifice: J (Body Material: Stainless Steel; Port Size: 3/8, Orifice Dia.: 15), Voltage/Electrical Entry: J (110VAC; DIN Terminal w/Surge Voltage Suppressor)

Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.

0.82 0.89 1.00 oC 225 30 35 40 45 1.0 0.85 0.80 0.73 0.62 IDFA6010 350.6MPa35> 360 m 3/h(ANR) 1.00 0.89 0.80 256 m 3/h(ANR) 7.2 GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J

Series: NCA1 (Standard), Mounting: J (MT2, Head trunnion), Bore Size: 150 (1 1/2"), Stroke: 0150 (1 1/2"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 200 (2"), Stroke: 0400 (4"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCA1 (Standard), Mounting: J (MT2, Head trunnion), Bore Size: 325 (3 1/4"), Stroke: 2800 (28"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)