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Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket C, Operation Manual: -

Note 4) Female thread port size (valve side) is 3/8 for AS320-02. How to Order T 01 S AS 2 0 0 2 Symbol Tamper proof Note) Speed controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1.

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

H D MS T T (with seal) VMG Hexagon Socket Head Male Connector: KJS Connection thread (T) UNF NPT <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

e q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !5 r t y !2 !3 !0 q u !4 e !1 e r t !0 !1 o q y !2 w u !

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N S GN GS LN LS GLN Nil GLS -Z Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart

(mm) Note) Effective area (mm2) Connection thread Rc Mounting plate thickness 7 mm or smaller Width across flat T (M) M Weight (g) Mounting hole L2 L1 Model H1 H2 KQG2E23-02 KQG2E04-01 KQG2E04-02 KQG2E06-01 KQG2E06-02 KQG2E06-03 KQG2E08-01 KQG2E08-02 KQG2E08-03 KQG2E10-02 KQG2E10-03 KQG2E12-03 KQG2E12-04 KQG2E16-03 KQG2E16-04 3.2 14.8 9.7 14.8 7 13.7 14.9 8.1 13.1 14.6 13 14.4 14.4 19.7 13.3

SJ 60 X90 (T) 2 3 Part no. Entry is the same as standard products.

D1 M M A L1 MS D1 D2 T L2 H VMG Connection threads Male Branch: KPQU, KPGU (M5) H (width across flats) Effective area mm2 D Model L TPH TPS A (M5) 2-Applicable tubing Note1) Connection thread R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 15-18-21