4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Air Fittings & Tubing

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

Smooth Cylinder/Low Speed Cylinder

Y-J010B Applicable bore Applicable bore Part no. B C d H Part no. B C d H 10 8 15.2 21 M4 x 0.7 SNJ-010B Y-J016B 16 SNJ-016B 10 NTJ-010A 11 12.7 M8 x 1.0 4 NTJ-015A 10 11 16.6 21 M5 x 0.8 7 8.1 M4 x 0.7 3.2 16 M10 x 1.0 14 16.2 4 16 8 9.2 M5 x 0.8 4 NDd9 NDH10 NX R1 U1 Part no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

Table of Contents

Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H M5 female thread, through type (with mounting hole) 4 NPT1/8 R1/8 6 M5 female thread, M3 x 0.5 M5 x 0.8 Port size M5 x 0.8 M5 x 0.8 through type plug-in

CQ2

21 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 7 10 14.6 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 0.5 0.3 0.5 0.3 0.5 0.3 0.5 0.3 IY-G012 5 5 8 10 10 14 18 22 5 5 8 10 10 14 18 22 12 16 20 25 32, 40 50, 63 80 100 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 10 12 16 20 22 28 38 44 +0.048 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070

VM

Push button (Mushroom) VM122-M5-30R/B/G/Y VM132-M5-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port 2-M5 x 0.8 depth 4 R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 1.6 mm O.T. 2-4.6 mounting hole 6.5 mm T.T.

Table of Contents

29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8,

AC

Model Description For AC1020 For AC2020 For AC2520 For AC3020 For AC4020 For AC4020-06 For AC5020 For AC5520 For AC6020 02 03 04 06 01 02 03 02 03 04 02 03 04 E30E20E30E6006 10 E6006 10 E10-M5 E6006 10 E50-06 E40Piping adapter 4 4 4 4 Y Pressure switch with piping adapter 02 03 04 06 2 2 2 Y 01 02 03 3 3 3 Y IS1000E02 03 04 02 03 04 3 3 3 Y IS1000EIS1000EIS1000EAttachment Accessory IS1000M

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

VM

Push button (Mushroom) VM122-M5-30R/B/G/Y VM132-M5-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port 2-M5 x 0.8 depth 4 R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 1.6 mm O.T. 2-4.6 mounting hole 6.5 mm T.T.

Rotary Actuator

Additionally, do not mount the foot bracket with the pressure applied to the port. y A port B port 0 a 1 w y y a e k w of y e e g k n ra of n e io at g ot R n R ra +4 0 n ot io 0 at at ot R 8 io 1 R n y +4 0 ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e k of 189 CRA1 Series Dimensions/Basic Type: ClRA1BS Size: 30 Single shaft: ClRA1BS 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

VM

Push Button (Extended)/VM122-M5-32R, B, G, Y/VM132-M5-32R, B, G, Y JIS Symbol 2 port Panel mounted hole 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

A

CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 N/A N/A Clevis CG-D020 CG-D025 CG-D032 CG-D040 CG-D050 CG-D063 CG-D080 CG-D100 Single rod clevis I-G02 I-G03 I-G03 I-G04 I-G05 I-G05 I-G08 I-G10 Double rod clevis Y-G02 Y-G03 Y-G03 Y-G04 Y-G05 Y-G05 Y-G08 Y-G10 Rod clevis pin IY-G02 IY-G03 IY-G03 IY-G04 IY-G05 IY-G05 IY-G08 IY-G10 Rear clevis pin CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 IY-G08

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.