Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Digital Flow Switch (Integrated display type)

type "L2" only 1030 0x0406 0 R/W Selection of external input U8 0 Y 0: oUt (Switch output) 1: in (Exterior input) 0: Air (Air) 1: Ar (Argon) 2: Co2 (Carbon dioxide) 1060 0x0424 0 R/W Fluid U8 0 Y 0: std (Standard condition) 1070 0x042E 0 R/W Normal condition U8 0 Y 1: nor (Normal condition) 0: HYS (Hysteresis) 1: Wind (Window comparator) 2: AC Output operation mode U8 0 Y (Accumulated output

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

2-Color Display Digital Flow Switch Series PFM

Vibration resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Note: Flow rate unit is based on standard conditions (20C, 1 atm, 65% RH). 920 2-Color Display Digital Flow Switch Series PFM5 Piping Specifications / Mass Part no. 01 02 N01 N02 F01 C4 F02 C6 C6 N7 4 (5/32") one-touch fitting 8 (5/16") one-touch fitting 1/4" one-touch fitting 6 one-touch fitting Rc 1/4 NPT

VZM400

-01-06 VZM450-01-06S Toggle lever VZM450-01-08 VZM450-01-30R VM-30CR Red VM-30CB Black VZM450-01-30B Push button (Mushroom) VM-30CG Green VZM450-01-30G VM-30CY Yellow VZM450-01-30Y VZM450-01-32R VM-32CR Red VM-32CB Black VZM450-01-32B Push button (Extended) VM-32CG Green VZM450-01-32G VM-32CY Yellow VZM450-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM450-01

AC Servo Motor Driver (Network card type ）

U32 ro Y 2 Alarm time (Hour) U32 ro 0 Alarm history 1 U8 ro ARRA 2A01h 1 Alarm No. U32 ro Y 2 Alarm time (Hour) U32 ro : : : : : : Refer to section 7.3.5 (2). 0 Alarm history 15 U8 ro 2A0F ARRA 1 Alarm No.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

Table of Contents

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

HRX-OM-Q026

Connection port Sealant Note: When using the Y strainer of the accessory, fasten it on the return port. Clean the filer of the strainer after the trial operation before starting the proper operation Sealant Barrel nipple 25A Y strainer 25A Accessories Connect the strainer so that the screen faces downward.

HRX-OM-T002

/Japanese 1pc.), Accessory Y strainer (40 meshes) 25A, Barrel nipple 25A Anchor brackets 2pcs.

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Title not found

U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with bracket reduces the tota assembled space.

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

LEC-OM071xx

Install the program using the following procedure. 2-3 2 P a n e l D i s p l a y a n d SigmaWin+TM 1. Please download the install program from our home page. 2. "SETUP.EXE" of the file is double-clicked. A message will appear, welcoming you to the SigmaWin+ program. 3. Click Next to continue.s 2-4 2 P a n e l D i s p l a y a n d SigmaWin+TM 4.

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Flat type Flat with rib (mm) Flat type Flat with rib (mm) M_I 01 H:t.Ij)(1 1t1ol8_125 y Mo\lel fA "B C 0 . EL F HJ,46 x l H:Mf!

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Compact Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !