E-P HYREG

k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 V,12 V 3-wire (NPN equivalent) A96V A96 IC circuit 5V 12 V Grommet A72H A72 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less Relay, PLC 2-wire A73C A80C A79W 24 V Connector IC circuit 5 V,12 V 24 V or less DDiagnostic indication (2-color indication) Grommet Solid state auto switches marked with are produced upon receipt of order.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

How to Order Manifold Assemblies (Example) VFR Double solenoid (24VDC) SY3260-5G-C6-Q (2 sets) Cylinder port size M5: M5 x 0.8 Example VP7 Single solenoid (24VDC) SY3160-5G-M5-Q (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U-Q VQC SQ R D side Port R C8: With 8 One-touch fitting P VQ Stations 1 2 n Port P C8: With 8 One-touch fitting VQ4 U

Air Slide Table

Dimensions [mm] X Metal stopper with bumper2 v v ZHF1 Rubber stopper v v ZHM1 Metal stopper v v ZLC1 Metal stopper Series X Y MM MQ MXQ6 20 11 M3 x 0.5 5 MXQ8 24 13 M4 x 0.7 6 MXQ12 29 17 M5 x 0.8 6 MXQ16 29 23 M6 x 1 10 MXQ20 35 28 M6 x 1 13 MXQ25 44 33.5 M8 x 1.25 15 Metal stopper with bumper2 v v ZLF1 Rubber stopper v v ZLJ1 Shock absorber/RJ v v Y 1 Only for use with a centralized adjuster

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

MXS

3 wire (PNP) P.5.3-39 V V Solid state switch F9BV F9B 2 wire V V Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire (NPN) V V Diagnostic indication (2 color) F9PWV F9PW P.5.3-66 3 wire (PNP) V V F9BWV F9BW 2 wire V V PLC: Programmable Logic Controller Note 1) Lead wire length 0.5m (Ex.)

Bernoulli Gripper

30 27 V 40 48 V V Aluminum 60 110 V 80 193 V 20 7 V NBR (Improved abrasion resistance) 30 17 V With 40 30 V or Resin without Silicone rubber (Heat/ozone resistant) 60 67 V 80 119 V 20 34 V 30 77 V Stainless steel 40 139 V 60 323 V 80 568 V CO NTENT S Model Selection p. 4 How to Order p. 5 Specifications p. 6 Lifting Force p. 7 Air Consumption p. 7 Lifting ForceDistance from

5 Port Solenoid Valve

v v v v v N COM v v v v v v SI Unit output polarity EX500 Gateway Decentralized System 2 (128 points) EX500 Gateway Decentralized System (64 points) EtherNet/IP DeviceNet PROFIBUS DP EtherNet/IP Nil + COM v v v N COM v v v v SI Unit output polarity EX600 integrated-type (for I/O) serial transmission system (Fieldbus system) DeviceNetPROFIBUS DP CC-Link EtherCAT PROFINET EtherNet/IP Nil

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

wire 24 V Connector Diagnostic indication (2-color indication) 20B59W Grommet H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 G59W G5PW K59W 3-wire (NPN) 3-wire (PNP) IC circuit Data 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet 2-wire Water resistant (2-color indication)

CY1

Review of larger bore size Determination of load's kinetic energy (E) E>Es EEs Bore size determination W V 2 E = _ x ( _) 2 1000 Note 2) Review of order made products based on operating conditions Determination of pressure (P) when making intermediate stop PPs P>Ps (Refer to p. 64 to 71.) (Refer to p. 50 for intermediate stops.)

42

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Low wattage type 0.4 3-position exhaust center 2-position double (Metal) 100 V 1.19 110 V 1.32 200 V 1.90 220 V 2.08 (A) 4 (B) 2 (A) 4 (B) 2 Apparent power [VA] AC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Modular/F.R.L. Units Series AC

40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 36 38 40 G 57 73 H 28 30 35 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AL20 AL30 AL40 5 4 6 S F 3 7 8 2 9 1 W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A E H L IN OUT Bracket (Optional) D Sight glass assy not applicable to AL20 9 Accessories 2-10 Residual Pressure Relief 3 Port Valve (V) 1 With

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.