Hydraulic

5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

Mechanically Jointed Rodless Cylinder Series MY1

plug) G G GB Cushion needle M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 2 x 2 x J depth K (Hexagon socket head plug) (WW) (WW) M5 x 0.8 XX XX (Hexagon socket head plug) M5 x 0.8 (Port) VV VV 2 x M5 x 0.8 2 x M5 x 0.8 MY1MG MY1MG (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

High Vacuum Angle Valve

/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

type plug connector (M): SY3120-M-Q L type plug connector (L): SY3120-L-Q VQD VFS VS VS7 VQ7 1.2-15 Body Ported Type Series SY3000 Dimensions Note)< >: Values with surge voltage suppressor 2 position double Grommet (G), (H): SY3220-Q G H G H Scale: 40% SY3220-M5-Q C4 C6 C4 C6 M type plug connector (M): SY3220-M-Q L type plug connector (L): SY3220-L-Q C4 C6 1.2-16 Body Ported Type SY3000/5000

Series VQ Base Mounted Metal Seal/Rubber Seal

kit: Terminal block C4 (4) 1 to 16 stations C kit: Individual connector M5(M5 thread) SY S kit: Serial transmission unit SYJ 818 (Single) 885 (Double, 3position) F kit: D-sub connector C8 (8) C3 (3.2) P kit: Flat cable connector Option: built-in silencer (Direct exhaust) C4 (4) VQ110 VQ111 VV5Q12VQ1000 Side T kit: Terminal block 1 to 16 stations SX C6 (6) C kit: Individual connector M5 (M5

24

, 125, 150 175, 200, 250, 300, 350, 400 53 37 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 25 53.5 37.5 10 9 7 42 11.5 10 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 MGT Bore size [mm] PA PB PW Q R S T U VA VB WA WB X XA XB YY YL Z 30 st or less Over 30 st 100 st or less Over 100 st 200 st or less Over 200 st 300 st or less Over

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

0.55

(Values at the initial period) Series VP500 Solenoid Specifications DIN terminal (D) DIN (EN175301-803) terminal (Y) Conduit terminal (T) Grommet (G), (H) L-type plug connector (L) M-type plug connector (M) Electrical entry G, H, L, M D, Y, T DC AC (50/60 Hz) 24, 12 24, 100, 110, 200, 220, 240 10% of rated voltage Coil rated voltage (V) Allowable voltage fluctuation Series VP700 Standard

Air Fittings & Tubing

<M5, M6> D P M Part No.

CV/MVGQ

T Bore size Stroke 28 [34.5] 48 [49] M5 x 0.8 M5 x 0.8 Manual override Width across flats B1 M5 x 0.8 RE A B REC 16 [17] S + Stroke H + Stroke Z + 2 x Stroke Rod End Nut CX Bore size (mm) 10 16 H1 B1 CY 7 3.2 8 4 MQQ M [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND RHC Z Z S Z S Z S S 96.5 [97.5] 104 [105] 96.5

CV/MVGQ

across flats B1 M5 x 0.8 RE A B REC 16 [17] S + Stroke H + Stroke Z + 2 x Stroke Rod End Nut CX Bore size (mm) 10 16 H1 B1 CY 7 3.2 8 4 MQQ M [ ]: Denotes the values of AC.

Electric Actuator/Slider Type

6y qw t re i u !2 !3 u LEYG M LEYG L #2 #1 @9 #0 #3 #4 #5 #6 Component Parts No.

smcmaintenancepartslist

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Vacuum Pad

Thread size Applicable pad O.D. symbol 04 06 08 10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

Vacuum Pad

Thread size Applicable pad O.D. symbol 04 06 08 10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.