Pad Diameter: ø8, Pad Type: Flat, Works w/Adapters ZP2A-Z01P, ZP2A-Z02P, Pad Material: Conductive Silicone Rubber, Mounting: M5 x 0.8 Male Thread

Pad Diameter: ø6, Blast Type, Pad Type: Flat, Works w/Adapters ZP2A-M01P, ZP2A-M02P, ZP2A-M04, Pad Material: FKM, Mounting: M5 x 0.8 Male Thread

Pad Diameter: ø2, Blast Type, Pad Type: Flat, Works w/Adapters ZP2A-Z01P, ZP2A-Z02P, Pad Material: Silicone Rubber, Mounting: M5 x 0.8 Male Thread

Pad Diameter: ø2, Blast Type, Pad Type: Flat, Works w/Adapters ZP2A-Z01P, ZP2A-Z02P, Pad Material: FKM, Mounting: M5 x 0.8 Male Thread

Pad Diameter: ø4, Blast Type, Pad Type: Flat, Works w/Adapters ZP2A-Z01P, ZP2A-Z02P, Pad Material: FKM, Mounting: M5 x 0.8 Male Thread

Pad Diameter: ø8, Pad Type: Flat, Works w/Adapters ZP2A-Z01P, ZP2A-Z02P, Pad Material: Urethane Rubber, Mounting: M5 x 0.8 Male Thread

High Vacuum Angle Valve

With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Aluminum High Vacuum Angle Valve

Replacement Heaters CYV Valve size 25 Temperature specification 100 160 40 50 63 80 XLA25-60S-2 (4 sets) H4 (100C heater) H5 (120C heater) XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-3 XLA25-60S-2 (2 sets) XLA25-60S-2 (3 sets) XLA25-60S-2 (3 sets) XLA25-60S-2 (2 sets) Example) In the case of a replacement heater for XL-80-H5, two sets of

High Vacuum Angle Valve

With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

XLAQ/XLDQ

applicable for H4, H5, Size 25 not for H4.

XL-OMY0002

Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMV0002

General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

applicable for H4, H5, Size 25 not for H4.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15