The D-MP□ series operation manual can be found here.
For details on the MRHQ-X103, refer here.
VEX1□0□ series regulator valves (3-port large exhaust capacity regulator valves)
・An external pilot solenoid type and an air operated type are available.・The pressure can be controlled remotely, and pipes of up to 2 inches are supported.
https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=directional-control-valves&fa_id=10039
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 07 (One-touch Fitting ø1/4")
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4")
Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)
Refer to the operation manual on the SMC website for details. The SI unit part number (EX□-□) is determined by the valve manifold model. Refer to the SI unit part numbers in the valve catalog.
The D-MP□ series operation manual can be found here.
The MXZ series catalog can be found here.
The AMJ series catalog can be found here.
Details on the EX140 series can be found here.
Be aware that the specifications vary depending on the communication protocol. Refer to the manual on the SMC website to check the specifications of each EX140 series SI unit.
Also use the “Air Preparation Filter Model Selection Software.”