Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Rated sensitivity current 10 {Ig1 Ign Iga K (Ig2 Igm)} [mA] (11.1) K: Constant considering the harmonic contents Cable Leakage current breaker K Type Products Noise NV NV-SP filter Driver M Servo Cable Models provided with harmonic and surge reduction techniques NV-SW amplifier NV-CP 1 NV-CW NV-L BV-C1 Ig1 Ign Iga Ig2 Igm General models NFB 3 NV-L Ig1: Leakage current on the electric channel

Fieldbus system EtherCAT compatible SI Unit

1: x = Unit No. 2: Applicable to the open detecting digital input unit (EX600-DX#C1) -100No.EX-OMA1023 Digital output unit (EX600-DY##) Index Name (Meaning) Type Value 40x0:0 Unit parameters UNSIGNED8 6 40x0:02 Monitor short circuit (out) Enum0800 0=Disable 1=Enable 40x0:06 Restart after short circuit Enum0801 0=Manual 1=Auto 40x1:0 Monitor open circuit UNSIGNED8 Number of Channels 40x1

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Air Cylinder

G G 4 x J Width across flats KA MM RY D E d e C B H1 10.2 L f B1 AL h + L C B A K ZZ + L + Stroke F N RT N M S + Stroke H ZZ + Stroke (mm) M Bore size Stroke range AL B B1 C D E F G H1 J K KA (mm) A (mm) Without reinforcement ring With reinforcement ring 40 50 63 80 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21

1

Please contact SMC for dimensions since A, AL, D, K, MM, W, H, ZZ dimensions are different from standard. Please contact SMC for dimensions since A, AL, D, E, EA, F , FA, K, MM, H, ZZ dimensions are different from standard.

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

JIS Symbol 15-9-19 2 Series AS How to Order 2 2 1 U02 06 K AS 1F Nil Option Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard None Hexagonal lock nut Electroless nickel plated K N If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

Micro Mist Separator Series AFD20/30/40

Note 2) Bowl assembly for AFD30 to AFD40-06 includes a bowl guard (steel band material). 14-2-44 Micro Mist Separator Series AFD20/30/40 Dimensions AFD20 Bracket (Option) L D G F K M J E B H OUT IN C OUT F.R.L.

Mist Separator Series AFM20/30/40

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 14-2-41 Series AFM20/30/40 Dimensions AFM20 Bracket (Option) L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30/40/40-06 Bracket (Option) A D G F K M J C B E H OUT IN OUT Port size Drain Min. clearance for maintenance AFM30: 50 AFM40: 75 P AFM20 AFM30, AFM40

LEC-OM071xx

Relay Circuit Example Open-collector Circuit Example DRIVER DRIVER 24 VDC +24 VIN 3.3 k 24 VDC +24 VIN 3.3 k /DEC, etc. /DEC, etc. Note: The 24 VDC external power supply capacity must be 50 mA minimum. The DRIVERs input circuit uses bidirectional photocoupler. Select either the sink circuit or the source circuit according to the specifications required for each machine.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model 1/4, 3/8, 1/2 3/4 3/4, 1 Port size 1/8 Pressure gauge port size Air Fluid 5 to 60C (with no freezing) Ambient and fluid temperature 1.5 MPa Proof pressure 1.0 MPa Maximum operating pressure 0.05 to 0.85 MPa Set pressure

KG

(mm) Note) Applicable tubing L1 M1 Weight (g) D1 L2 Q D2 M2 Model a b Urethane Nylon Applicable tubing KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 6 4 10.4 12.8 16 17 19.5 22.5 18 20 4.5 5.3 21 22 17 18.5 18.5 20.9 12.8 15.2 56 44.5 36 27.2 8 5 10 8 8 6 KGT08-10 26.5 28.5 15.2 18.5 18.5 21 23 26.5 6 6.8 14 21 KGT10-12 12 10 Note) D1: Max. diameter K Applicable tubing M H Male Run Tee: KGY D H (width

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Including Bracket, Screw, Set Screw) Applicable bore size (mm) Cylinder series C96 32 BT-03 40 BT-03 50 BT-05 63 BT-05 80 BT-06 100 BT-06 125 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes