SMC Corporation of America
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Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

(AFM, AFD) 0.12 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.06 0.04 0.04 0.02 0.02 0 80 160 240 200 400 600 800 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) IDG75M, 75V (standard dew point 20C (4F)) IDG75HM, 75HV

= 1.0 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.08 0.08 P1 = 0.7 MPa Pressure drop [MPa] Pressure drop [MPa] P1 = 1.0 MPa 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 0.02 0.02 0 0 0 500 1500 1000 Flow rate [L/min (ANR)] 0 2000 1000 4000 3000 Flow rate [L/min (ANR)] AF40-D Rc1/2 AF40-06-D Rc3/4 0.1 0.1 P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 =

] 0.03 0.02 0.02 P1=0.3 MPa P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.7 MPa P1=0.7 MPa 0.01 0.01 0 0 0 0 50 100 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=

P1=0.7MPa 0 0 0 0 50 100 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM30-A AFD30-A P1=0.5MPa 0.04 0.04 P1=0.7MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.03 Pressure drop MPa Pressure drop MPa 0.03 P1=0.7MPa 0.02 0.02 P1=0.5MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.01 0.01 P1=0.7MPa P1=0.7MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM40

Ex2) 3 port valve: Switching nozzle VNH P1 P1 port (Pilot air SUP port) nozzle P1 port (Pilot air SUP port) 2(A) 1(P) Tank Coolant pump 3(B) Switching nozzles on supplying coolant liquid.

P1 = 0.7 MPa P1 = 0.7 MPa 0.08 0.08 P1 = 0.5 MPa P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.1 MPa 0.06 0.06 P1 = 0.3 MPa Maintenance 0.04 0.04 F.R.L. Warning 0.02 0.02 AV 1.

The port P1 on the valve is used as a pilot port, but not the P1 hole on the manifold base.

P1 = 0.7MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.1MPa P1 = 0.5MPa 0.06 0.06 P1 = 0.1MPa P1 = 0.3MPa 0.04 0.04 Maintenance Warning 1.

Specific Product Precautions P1 = 0.5MPa Pressure drop MPa 0.08 0.08 Pressure drop MPa P1 = 0.3MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.1MPa 0.06 0.06 Be sure to read before handling.

P1 = 0.7 MPa P1 = 0.7 MPa 0.08 0.08 P1 = 0.5 MPa P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.1 MPa 0.06 0.06 P1 = 0.3 MPa Maintenance 0.04 0.04 F.R.L. Warning 0.02 0.02 AV 1.

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6S(P1+0.1013) l/min(ANR) gP(P2+0.1013)l/min(ANR) Saturated Steam How to Read the Graph In the sonic flow region: For a flow of 15kg/h Orifice 4.5 valve(VX2m3mS)...P1 0.15MPa Orifice 3 valve(VX2m2mS)...P1 0.37MPa Orifice 2 valve(VX211mS)...P1 0.82MPa Heat content will differ somewhat depending upon the pressure P1, in the case

1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Flow Rate Characteristics Flow Rate Characteristics VBAT05A 2 1.6 0.1 ARJ 1.4 Outlet pressure (MPa) Outlet pressure (MPa) P1 = 1.0 MPa 1.2 P1 = 0.8 MPa Max. pulsation range (MPa) AR425 to 935 0.08 P1 = 0.75 MPa P1 = 0.7 MPa 1 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.5 MPa 1 0.8 P1 = 0.4 MPa 0.06 ARX P1 = 0.3 MPa P1 = P2 0.6 P1 = P2 AMR 0.04 0.4 0.2 ARM 0.02 VBAT05A 0 500 1000 1500 2000 2500 3000

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 5 4 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 Glossary of Terms 0.002 0.003 0.02 0.03 0.04 0.004 0.001 0.01 0.1 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when 15 [L/min] of water runs through a solenoid valve with a Kv = 1.5 [m3/h].

Enter the P1 pressure value. Fully open the stop valve and press the SET button. P1 Press the SET button. P1 2. Enter the P2 pressure value.