Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-1A-3Electrical entry F1: For F kit P1: P, G, T, S kit for 1 to 12 stations/Double wiring P2: G, S kit for 13 to 16 stations/Double wiring P3: G, S kit for 1 to 16 stations/Single wiring L0: L0 kit L1: L1 kit L2: L2 kit Lead wire assembly for extensions is attached. Note) Note) Note) Note) : Stations (1 to 16) No. Part no.

ZM

thread ridge shape is compatible with the G thread standard (JIS B0202), but other shapes are not conforming to ISO16030 and ISO1179. 1 output, without analog output, Diaphragm (18 rotation setting), Solid state(10 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (18 rotation setting), Reed (AC/DC 100 VAC)(ZSM1) Supply valve/Release valve combination Manual override J K A B P3

Clean Air Module LLB Series

Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3

Series ZB Compact Vacuum Unit

Latching type is applicable only to the ejector nozzle sizes 0.3 and 0.4 Table 1 1 Compact Vacuum Unit Series ZB Pressure Sensor/Vacuum Pressure Switch Specifications Type Symbol Pressure range psi (kPa) Specifications Without pressure sensor/vacuum pressure switch Nil P1 P3 EA EAM EAP EB EBM EBP FA FAM FAP FB FBM FBP Output: 1 to 5 V, accuracy: 2% F.S. or less Note 7) Output: 1 to 5 V, accuracy

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

Vacuum Ejector Series ZM

thread ridge shape is compatible with the G thread standard (JIS B0202), but other shapes are not conforming to ISO16030 and ISO1179. 1 output, without analog output, Diaphragm (18 rotation setting), Solid state(10 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (18 rotation setting), Reed (AC/DC 100 VAC)(ZSM1) Supply valve/Release valve combination Manual override J K A B P3

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 19 (3/4" or ø19), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P3 (Direction 3), Option 1: None, Option 2: J (for High Temperature)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 1 (With Flow Rate Adjustment)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P3 (NPN Open Collector, 2 Outputs), Regulator: R (With Regulator), ON/OFF Valve: V1 (With Air Operated Flow Adjuster), Restrictor: Without Restrictor, Filter: F (With Filter)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P3 (NPN Open Collector, 2 Outputs), Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V (With Air Operated), Restrictor: S (With Restrictor), Filter: F (With Filter)

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes