Vacuum Pad

or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali = Excellent --Not affected

Vacuum Pad

or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali = Excellent --Not affected

Magnetically Coupled Rodless Cylinder

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 78 66 6 135 123 8 173 161 10 211 199 2 59 47 4 97 85 5 116 104 7 154 142 9 192 180 11 230 218 12 249 237 13 268 256 14 287 275 15 306 294 1.2-66 Series SYJ7000 21 Type Manifold: Top Ported/SS5YJ7-21Station Grommet(G), (H) Manual override 4-4.5 (Mounting holes) Depress and turn to operate and lock override.

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $erie Manifold Dimensions inch (mm) NZZM05-T068 n: stations L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.\ L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72

Thermo-chiller

Contact circulating uid supplier for details. 104 (40) 0.99 4.18 x 103 0.99 1 x 103 15% Ethylene Glycol Aqueous Solution 24 Series HRS100/150 Specic Product Precautions 1 Be sure to read this before handling. Refer to the back cover for Safety Instructions.

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

Vacuum

L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (120\ 5.35 (136) 5.98 (152) 6.61 (168) 7.24 (18/.\ 7.87 (2001 Millimtef in parentheses 53 C Single-Stage Nozzle (o1.5) . Produces high suction flow with quick response time. . Interchangeable with all other nozzleldiffuser ass'ys.

AS

Note 3) Reference dimensions 104 AS431F-04-11 18.5 49.4 25.8 32.6 21 16.2 57.1 3/8" 24 28.6 1/2 42.1 56.7 49.2 49.6 (23.8) 106 AS431F-04-13 21.7 52 22 26.8 36.3 60.8 19.4 1/2" 421 Series AS Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and delivery.

SYJ300/500/700

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500

Modular F.R.L. Units

A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2 75.2 80.2 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 43.2 57.2 57.2 75.2 80.2 AC20-A AC25-A AC30-A AC40-A AC40-06-A K KS V S KV KSV SV A3 43.2 57.2 75.2 Attachment Model A2 57 74 95 102 A1 41.6 55.1 72.6 77.6 A3 43.2 57.2 75.2 A2 57 74 95 A1 41.6 55.1

ZP

F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10 ZPTB20-0-A14 94 44.5 94.5 95.5 99.5 100.5 23 44 95 49.5 139.9 50 144.9 74 70 143.9 148.9 ZPTB20-0-A10 ZPTB30-0-A14 133 138.5 132 54.5 132.5 133.5 137.5 54 59.5 149.9 154.9 84 80 153.9 158.9 51 ZPTB30-0-A10 ZPTB50-0-A14 143 148.5 142 64.5 142.5 143.5 147.5 64 69.5 100 194.9 199.9 104

Vacuum Pad

or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali = Excellent --Not affected

Vacuum Pad

or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali = Excellent --Not affected

C85

{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 4.5 12 19 6 10.5 28 16 7 48(53) 104(109) 7(5.5) 11.5(13.5) 10 12 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 5.5 17 24 5 8 9.5 38 22 10 52(54) 128(130) 8(5.5) 12.5(12.5) 12 16 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 5.5 17 24 5 8 9.5 38 22 10 52(54) 128(130) 8(5.5) 12.5(12.5) 16 16 22 17 M8 x 1.25 G 1/8 M22 x 1.5 8 28 24 8.5 20

Electric Actuator

less (No condensation) Guide type Operating temp. range Operating humidity range [%RH] Motor size Motor type Encoder Rated voltage [V] Power consumption [W] Note 8) l28 l42 Step motor (Servo/24 VDC) l56.4 Incremental A/B phase (800 pulse/rotation) 24 VDC 10% 23 16 43 40 15 48 0.33 lbs (0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting) Non-magnetizing operation type 50 48 104

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Table 10.1 lists the enclosure dissipation area for each driver when the driver is operated at the ambient temperature of 40 (104 ) under rated load.

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

Series H, DL, L, LL Self-align Fittings

Male elbow Bulkhead union P. 104 DL Use to pipe at right angle to female thread portion. Most general type. P. 105 DE Use to junction connection of tubes for panel. Union tee Bulkhead connector P. 104 DT Use to branch connection of tubes of both sides 90 direction. P. 105 DEF Use for transit connection of a tube and a male screw on panel.

0.5

) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions Power supply cable IZS41-CP Part no.