Hand Valve Series VH

88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 Series VH Dimensions: Body

SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-14 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

FT FX FY FZ G GA GB J K M MA MM NA NB P D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 60 44 18 45 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14 x 1.5 30 22 1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102

Compact Cylinder with Lock Series CLQ

23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 10 Series CLQ Dimensions/40 Double end tapped: CLQA40 16 3.2 16 3.2 2 x 4-M5 x 0.8 Standard type (through hole): CLQB40 Extension locking LOCK 8 M8 x 1.25 effective thread depth 13 Rc 1/8 Rear cylinder port 11 45 Rc 1/8 Front cylinder port Approx. 35 2-5.5 through 2 x 2-9 counter bore depth 7 69 16 22 11 14 52 40 Minimum lead wire

Air Cylinder CP Series Cylinder Positioner Assembly

) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24 (s3) 6.69 (170) 2.O5 (.521 2.da (66) (r78) 1.57 (40) 402 (102

Compact Guide Cylinder End Lock Type SeriesMGP

25st or less Over 175st 25st or less Over 175st 42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

PC Wiring System Series PCW

Input PCW-EC16XBR00 PCW-EC16XBR01 PCW-EC16ZBM00 PCW-EC16ZBM01 Output Note PCW-EC16YBR00 PCW-EC16YBR01 Circuit board type With cover (DIN rail mount compatible) Circuit board type With cover (DIN rail mount compatible) 2 Series PCW-EC Circuit Diagram PCW-EC16XBR00 PCW-EC16XBR01 [Applicable PLC example: OMRON Corporation C200H-ID218] 115 114 113 112 111 110 109 108 107 106 105 104 103 102

3 Position Cylinder Series RZQ

21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

5 Port Solenoid Valve, Series VQC

Nil R Y Standard type (1W) External pilot Low wattage type (0.5W) EAPEB 3-position exhaust center A B 4 P EA EB Note) When specifying more than one option, enter symbols in alphabetical order. 3-position pressure center A B 5 EB P EA 3-position perfect A B Seal type 6 0 1 Metal seal Rubber seal EB P EA Manifold Options Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102

VH Series, 4 Way Hand Valve

89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5 65 1.5 123 105.5 25 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH43 -N02/N03/N04 (Bottom porting) VH43 -N06 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 9

Precautions 1

25 6.8 4 5 28 8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8 20 62 M8 x 1.25 M20 x 1.5 24 55 15 135 25 8 20 62 M26

Water-cooledThermo-chiller

3.4 gal (13 L) Approx. 3.7 gal (14 L) Circulating fluid recovery tank volume Note 7) 3.2 gal (12 L) Port size Rc3/4 Wetted parts material Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, PPS, Fluororesin Temperature range 50 to 95F (10 to 35C) Required flow rate Note 8) 2.6 gpm (10 L/min) 5.3 gpm (20 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Inlet pressure range 44 to 102

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Input: CLR, TL Output: TLOUT Reconnect Reconnection of axis Reconnect Dimensions 34.5 w 102 4 No. Description Function 1 LCD A screen of liquid crystal display (with backlight) q r 2 Ring A ring for hanging the teaching box 3 Stop switch When switch is pushed in, the switch locks and stops.

Fieldbus System

How to Order Valves (With two mounting screws) SY 3 5 1 0 0 1 Series 3 5 Base mounted SY3000 SY5000 Pilot valve option Manual override Type of actuation Nil B K Standard (102 psi) Quick response type (102 psi) High pressure type (145 psi) Nil: Nonlocking push type D: Push-turn locking slotted type F: Slide locking type 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed

Tie-rod Type Hydraulic Cylinder

J K MM MA NB P NA M 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 95 17.5 9.5 M8 x 1.25 M14 x 1.5 18 20 60 18 44 22 44 77 1/4 25 14 30 9 16 10 50 19 50 25 9 73 115 17 13 M10 x 1.5 M16 x 1.5 20 22 73 20 53 26 53 95 3/8 28 17 30 11 22 10 63 21 55 28 8 80 122 17 13 M10 x 1.5 M18 x 1.5 22 25 80 22.4 60 26 60 102

ZP

Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101 p. 111 With buffer ZPR p. 46 p. 59 p. 82 p. 93 p. 102

RZQ

39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Maximum operating pressure 1.0 MPa Rubber bumper None Piping Screw-in piping Piston speed 50 to 500 mm/s Mounting Through-hole Auto switch Mountable 7-6-101 102 Refer to page 7-9-1 for further information on auto switches.