IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

AC Servo Motor Driver (Network card type ）

(Example) When STA = 20, STB = 5000 and STC = 200, the actual arc part times are as follows. At acceleration: 100 ms 20 20 = 100 [ms] < 200 [ms] Therefore, it will be limited to 100 [ms]. At deceleration: 200 ms 20 5000 = 400 [ms] > 200 [ms] Therefore, it will be 200 [ms] as you set. Setting range: 0 to 5000 5 90 5.

Solid State Auto Switches

D-APC 4 g M8-3 pin Manufacturer Connector size Number of pins Applicable series example D-BPC 4 g M8-4 pin Phoenix Contact SAC-3P D-DPC About 11 g M12-4 pin 3 M8-3D Corrence Corporation M8 M8-4D OMROM Corporation XS3 Phoenix Contact SAC-4P DDCorrence Corporation VA-4D 4 OMROM Corporation XS2 M12 Azbil Corp. PA5-4I Hirose Electric Co., Ltd. HR24 DDK Ltd.

2 Phase Stepper Motor/Without Motor Brake Series LXS

200/230VAC Note) Refer to pages starting with 205 for driver dimensions.

Floating Joint

JA200-45-150-X530 M45 x 1.5 e 5 g n ra Axial center U U g in at er 5 p O How to Order JA F 180 40-150 X530 Mounting type For pneumatic cylinders (180, 200) Nil Basic type F Flange type L Foot type Applicable bore size Nominal thread size Symbol Applicable bore size 180 180 mm 200 200 mm Nominal thread size Applicable cylinder nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type

e

Coordinates and moments Load mass and static moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x z Y y m2 x g m3 x g x X x X Z Y M1: Pitching Horizontal mounting Ceiling mounting Wall mounting m1 m2 m3 Mounting orientation y Static load (m) x M2: Rolling m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y M1 m3 x g x Z m3 x g x X g: Gravitational

Rotary Table/Rack & Pinion Style Series MSQ

How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all M5.

Series IDG

300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min

Compressed Air Cleaning Filter Series

AM-BM103 AM-BM104 AM-BM105 BM56 BM57 Water removal rate (%) = Removed water (Water droplet) (g) Inflowed water (Water droplet) (g) Caution x 100 Be sure to read this before handling.

ISA2

Position of supply port: Either right side or left side is available. 2 wiring methods Variations Variations Variations ISA2-G ISA2-H Model Operating pressure range 30 to 200 kPa 50 to 200 kPa 0.01 to 0.25 mm 0.03 to 0.5 mm Individual wiring Detection distance Individual wiring NPN open connector, PNP open collector Output type Lead wire with connector (Individual wiring) Terminal box (Centralized

0.55

(Values at the initial period) Series VP500 Solenoid Specifications DIN terminal (D) DIN (EN175301-803) terminal (Y) Conduit terminal (T) Grommet (G), (H) L-type plug connector (L) M-type plug connector (M) Electrical entry G, H, L, M D, Y, T DC AC (50/60 Hz) 24, 12 24, 100, 110, 200, 220, 240 10% of rated voltage Coil rated voltage (V) Allowable voltage fluctuation Series VP700 Standard

Compact Manifold Regulator Series ARM5

250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet

MB1

Moreover, due to the fact that bumpers are installed at each end of the piston, overall length is increased by 6mm for 32 and 40, 8mm for 50 and 63, and by 10mm for 80 and 100. 90 90 102 102 124 124 164 200 200 141 145 164 Width across flats Stroke range Bore size (mm) Effective thread length A D Ee11 F G H MB J K MM N P S V W ZZ C B 32 40 50 63 80 100 19.5 27 32 32 37 37 46 52 65 75 95

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

JXCx-OMT0023

command Program end 500[r/min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

Step Motor Controller

(Screw mounting) 6.0oz (170 g) (DIN rail mounting) Weight [g] Note 1) Do not use the power supply of inrush current prevention type for the controller power supply.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Air Slide Table Series MXW

Contents Applied part Grease pack part no. 8 12 16 20 25 GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) MXW8-PS MXW12-PS MXW16-PS MXW20-PS MXW25-PS Guide Set of nos. above !9, @0, @1 DGR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Cylinder -X Seal kit includes !9, @0, @1, Order the seal kit, based on each bore size.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

REC

10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150 to 700 M26 X 1.5 25 9 146 14 221 230 150 to 700 M26 X 1.5 32 9 159 14 234 243 150 to 1000 M32 X 2 40 11 181 18 270 281 200 to 1000 REC D/Double clevis 2-Rc(PT)P NN CDH10+0.058 0 G Relieving port M5 X 0.8 G Standard port H1 Width across flats B1 I