Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Lubricator Series AL10 to 60

AL Standard Specifications AL30 AL40 AL60 AL10 AL20 AL40-06 AL50 Model 1/4, 3/8 Port size 1/4, 3/8, 1/2 1 M5 x 0.8 1/8, 1/4 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 1/4: 30 3/8: 40 1/2: 50 Note) 1/4: 30 3/8: 40 220 Minimum dripping flow rate (/min (ANR)) 4 15 50 190 Oil capacity (cm3) 55 135 7 25 135 135 135 Recommended lubricant Class 1 turbine oil (

Micro Mist Separator Series AFD20/30/40

23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70 75 B 97 129 165 169 C 10 14 18 20 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B B 97 142 178 182 B AFD20 AFD30 AFD40 AFD40-06 137 173 177 162

Mist Separator Series AFM20/30/40

10.5 G 27 40 54 54 H 22 23 26 25 J 5.4 6.5 8.5 8.5 F 30 41 50 50 D 40 53 70 70 P 57 73 73 E 18 16 17 14 C 10 14 18 20 A 40 53 70 75 B 97 129 165 169 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 AFM20 AFM30 AFM40 AFM40-06 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFM20 AFM30 AFM40 AFM40-06 162 198 202 137 173 177

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Body Ported Type Vacuum Ejector ZH Series

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

Compressed Air Cleaning Filter Series

How to Order AD402 03 06 AD600 Metal bowl 2 Nil Option Thread type Thread type Nil N F Nil N F Rc NPT G Rc NPT G Port size Port size OUT IN Symbol OUT IN Symbol 06 3 4 3 4 1 1 3 8 3 8 02 1 4 3 8 10 04 03 1 2 3 8 73 Related Products: Auto Drain Valve Series AD402/600 Construction/Dimensions AD402 AD600 !

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Cylinder series Applicable bore size (mm) 10 16 20 25 32 40 50 63 6 BJ2-006 BJ3-1 CDJ2 BJ2-010 BJ3-1 BJ2-016 BJ3-1 CDVJ3/5, CDJ2X CDBJ2, CDLJ2 CDM2, CDBM2 CDM2X, CDM2Y CDLM2, CDVM3/5 CDG1, CDBG1 CDG1Y, MGG RHC MGC CDLG1, CDNG MLGC, REC CKG1 BM2-020 BJ3-1 BM2-032 BJ3-1 BM2-025 BJ3-1 BM2-040 BJ3-1 BMA2-063 BJ3-1 BMA2-050 BJ3-1 BMA2-020 BJ3-1 BMA2-032 BJ3-1 BMA2-025 BJ3-1 BMA2-040 BJ3-1 BMA2

NCG/CG1

Bore size 40 mm (1-1/2) 50 mm (2) 63 mm (2-1/2) Stroke Hundredths of an inch* 20 25 32 40 50 63 20 mm (3/4) 25 mm (1) 32 mm (1-1/4) Stroke length must be indicated as 4 digits.

IIIIIII

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

VZS

Symbol Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS3 C8 06 51 1 Thread type Series VZS3000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Rc 1 4 02 Stations Embedded type One-touch fitting Applicable tubing

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

IZx-OMP0064

1 1 1 IZS40-E3 5 4 5 5 6 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 1 2 520 1 1 700 2 1 1540 1660 1720 1 1 1 1 1 1 760 1 1 1 880 1 2 1780 1840 2 1 2 940 3 1000 2 2 1960 2020 1 1 5 6 6 7 6 6 1 3 2 3 1060 1 1 2 1180 1 3 2080 2140 2 4 2 5 1240 4 1360 1 1 3 1 1 2200 2260 2 1 1 7 2 7 1420 1 4 1480 1 4 2380 2440 8 7 AC adapter AC adapter for IZS40 Note) AC cord is only for use in Japan

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

, 400-06, 500, 600, 800, 900 Pressure Characteristics How To Order 145 NALF 4 00 N02 B 120 Tank pressure (psig) 90 Option Body size 4 1/2 5 3/4 6 1 8 1-1/2 9 2 Nil None B Bracket Port size 60 02 1/4 03 3/8 04 1/2 06 3/4 10 1 12 1-1/4 14 1-1/2 20 2 30 0 15 30 45 60 70 90 100 Line pressure (psig) l e d o M A B C D e z i S t r o P Dimensions/Auto feed lubricator 0 0 4 F L A N 5 1 . 3 ) 0

ALF400 to 900, ALT-5/-9

Lubricators NALF400, 400-06, 500, 600, 800, 900 Pressure Characteristics How To Order 145 NALF 4 00 N02 B 120 Tank pressure (psig) 90 Option Body size 4 1/2 5 3/4 6 1 8 1-1/2 9 2 Nil None B Bracket Port size 60 02 1/4 03 3/8 04 1/2 06 3/4 10 1 12 1-1/4 14 1-1/2 20 2 30 0 15 30 45 60 70 90 100 Line pressure (psig) l e d o M A B C D e z i S t r o P Dimensions/Auto feed lubricator 0 0 4

KJ

9.3 15.6 2.5 1 8 26.7 1 16 10-32 UNF 29.6 31.9 2.3 2.5 4.6 17.6 17.6 1 4 13.6 12 17 17.9 1 8 30.3 Reference dimensions after NPT thread installation.

Series AP500

to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Code 01 02 06 10 15 Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal