IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W022

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W035

( ) ) ( L1 L2 L3 =M4X10 9-3 IDFB Series 9-2 IDX-OM-W035 9 R 9-4 () () ONOFF 9-5 M 6-4 6-3 T 11-6 11-4 9-4 IDFB Series 9-3 IDX-OM-W035 10 S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm

IDX-OM-W034

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVZ2000-31A-2 1 pc. VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

KJ

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

Series SY100 3 Port Solenoid Valve Rubber Seal

Note 2) Value for DC. Add 1g for AC.

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

SYJA300

SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set (Ex.) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set The asterisk denotes the symbol for assembly.

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

Fieldbus system PROFINET compatible SI Unit

No.2.

SYJ Series

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Manifold Specifications

VQ7 EVS How to Order VFN VV 1 T 05 SC 0 1 4 S Valve Manifold base Thread type Electrical entry Nil Rc NPT NPTF Symbol Electrical entry position Applicable valve series N Valve body SU SC Manifold block VS410 S T F Applicable valve 4 way Manifold specifications Option Symbol EXH SUP 1 2 3 4 Applicable valve Base size: 1 8 Common Common Common Individual Individual Common Individual Individual

VEX-OMT0003

) Sub plate VEX1-9-2 (1) (2) VEX4-2A-1 (1) (2) Base gasket VEX1-11-2 VEX4-4 Function plate between pilot valve and cover (with gasket) DXT152-14-1A Grommet L-connector M-connector V114VO307K-1 Pilot valve DIN terminal V115Note 2) Select the symbols from the table below for (1) and (2). (1) Port size (2) Thread type Symbol Port size Symbol Thread 4 5 type VEX322 VEX342 Nil Rc A 1/8 1/4 F G

High Vacuum Slit Valve

And fixing seal between the bonnet ASSY and the body 21 is realized by an O-ring . 3-2-2 Closing gate (Figure 2A to Figure 2B) The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping (in other words, pressure is exhausted from OPEN side of pressure piping).

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: N11 (3/8 inch), Option: R (External Pilot)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: C10 (10mm), Option: R (External Pilot)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: C12 (12mm), Option: R (External Pilot)