7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

5 Port Solenoid Valve SY Series

double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

4/5 Port Air Operated Valve Series SYJA3000

40 2 Base mounted VHS Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

SZ3000

0 (A) 4 (B) 2 (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i JIS Symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 e w t y q o r u !

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) Base mounted Body ported With Bracket Air operated valve type SYJA3 2-M3-F 1 2 JIS Symbol SYJA312 4 SYJA322 4 Pilot Pressure Range Caution (A) 2 (A) 2 For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Modular Type Regulator Series AR

4) Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G27-10-R1 Note 3) Round 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

A

1.06 5/8 2 1/2 2.6 2.4 1 1.71 5 3/4 3 5/8 6 1/4 3/4 1/2 9/16 3/8 3/8 3/4 5/8 1/2 250 (2.5) 7/16-20 3/4 1 1/8 3/8 5/16-24 3 0 1.3 1.06 5/8 3.1 2.48 1 5 7/8 1.75 3 3/4 6 3/8 3/4 1/2 9/16 3/8 3/8 3/4 5/8 1/2 325 (3.25) 1 1/8 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18 1 1 1/4 1 3.9 2.72 1 3/8 7 1/2 2.34 4 1/4 8 1/4 1 1/4 3/4 3/4-16 7/8 1/2 5/8 3/4 400 (4) 1 1/8 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1.18 1 1

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

IR1000/2000/3000

2 !3 !4 !

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20