CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Vacuum

rcbs6 .upe@r l ffi-q"q!rgEee!e' reE wt' lsd/$r! w[6a. tup@s' EB wd. tc'/!'! "orbrgpss (d+d., rpe) l Elccdcdl druy Nd 1)rrl ub4di2vDcmv M 2) srE eu'!. ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $enie Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

Guide Cylinder Series MGG

t w r y !

Mechanically Jointed Rodless Cylinders

8 q y !0 !4 !9 r !1 @0 @2 @5 o @4 @3 !

Process Valve Series VNA

0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve How to Order Pilot Solenoid Valves Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

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7.5

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2B60 [N.O. valve x 2] SJ2B60 [N.O. valve x 2] SJ2B60K with back pressure check valve !0 y t r w e u w !2 i !

VDW

1 o w !0 !1 e r w e u r u t t y q y q Component Parts Description Material No.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Vacuum

rcbs6 .upe@r l ffi-q"q!rgEee!e' reE wt' lsd/$r! w[6a. tup@s' EB wd. tc'/!'! "orbrgpss (d+d., rpe) l Elccdcdl druy Nd 1)rrl ub4di2vDcmv M 2) srE eu'!. ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $en ) Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

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e t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

5 Port Solenoid Valve Series VQZ1000/2000/3000

W) High pressure/External pilot type (Metal seal type only) KR Note 1, 2) (0.9 W) Note 1) Option Note 2) For details on external pilot type, refer to page 966.

High Vacuum Angle Valve

With heat-resistant 2-color indicator solid state auto switch Sensor How to Order Amplifier q w e r t y u XL 2 M9NJL A A 40 H4 Heater XLA w Flange size q Series e Indicator/Pilot port direction Rear flange surface Size 25 40 50 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Valve type Shaft seal type A Single acting (N.C.)

Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Dual Rod Cylinder Series CXSJ/CXS

9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

REA/REB

9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

2/3 Port Valve

0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

NCQ8

Q N-through hole C-depth J E H-thread M2 bolt circle W M1 D-rod dia.

HRL

Tap water: Standard of The Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994) *2 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Circulating fluid flow rate: Rated flow, t Power supply: 400 VAC *3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow

Compact

w e r t y !