XL to 140F) [high temperature type: 5 to 150C (41 to 302F)] 5 to 50C (41 to 122F) Operating temperature C XLDV Operating pressure Pa {Torr} Atmospheric pressure to 1 x 10 -6 {760 to 7.5 x 10 -9} 14 45 80 160 200 Main exhaust valve Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10 -10 {1 x 10 -9} at ordinary temperatures, excluding gas permeation
O After a few seconds at 10-6Torr 41
Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE B X 2 E X G Seal Y200T Y400T J F A H K Spacer width D Model A B BB C D E EE F G G H J K Applicable model Y100T 6 56 24.5 40.5 20 27 6.8 4.5 4.5 14 2.8 25 AC10 Y200T 3 67 29 53 24 33 12 5.5 5.5 19 3.2 30 AC20 Y300T 4 82 41 68 35 14 7 7 21 4 41 AC25, AC30 Y400T 5 96 48 81.5 40
C EU W B F BA H K J S SU Model l M8 x 1.25 depth 8 144 (177) 5 0 0.030 9 CRA1BSU50 8.5 62 1/8 15 17 M16 x 1.5 45 17 25 11 14 98 15 46 12 48 2.5 36 5 25 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x 1.75 depth 14 163 (201.5) 6 0 0.030 11 CRA1BSU63 10 76 1/8 17 20 M20 x 1.5 54.5 19.5 30 13 18 117 19 57 14 60 2.5 41 5 30 186 (230) 6 0 0.030 13 CRA1BSU80 12 92 1/4 20 23.5 35 M24 x 1.5 62.5 22.5
117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the dimensions for rotation of 180 and 190.
(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5
16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-
63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.
63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.
755 812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 Type 42/Individual exhaust: VV3PA7-423-04 Stations (Pitch) P = 41 1/2 3(R) port 37 34 3R 3R 12 2 x 8.5 (For mounting) 127 N.C.
32 32 26 50 45 45 41 6 6 5 8 8 8 1/8 88 64 62 62 45 41 41 37 42.5 34.5 30 24 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 The bracket is shipped together.
Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.
87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10
58.5 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) L2 L1 P = 41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100
NC 14 17 VV 10 12.5 PP 7.5 11.5 XX 30 32 QQ 9 10 RR 11 14.5 TT 15 18 UU 14 12 SS 2.5 5 Model MY1C16G MY1C20G "P" indicates cylinder supply ports.
Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10
Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10
Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10
Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10
4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 S Without auto switch With auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 15 st 48 56 60 56 60 62 15 st 76 87 91 90 98 104 15 st 76 87 91 100 108 114 15 st 48 56 60 66 70 72 5 st 56 62 66 65 73 79 5 st 38 41 45 51 55 57 5 st 56 62 66 75 83 89 10 st 43 46 50 46 50 52 10 st 66 72 76