ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

Smooth Cylinder/Low Speed Cylinder

0 0.033 0 0.039 Boss-cut Style (mm) (mm) ZZ 103 107 109 138 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 D-X 1195 Series CM2Y Head Side Trunnion Style (T) CM2YT Bore size Stroke Effective thread length 2 x FL 0.025 0.061 TDe9 Width across flats B2 G 2 x P (Rc,

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

style: CG1FN Bore size (mm) Stroke range (mm) B E F FX FD FT H 20 25 32 40 Up to 125 6 5.5 28 2 12 40 35 Up to 200 7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids possible) 16 08 16 stations 8 stations Note 1) Double

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Nozzle Type Ionizer

mA Residual voltage: 1 V or less (Load current at 40 mA) Max. applied voltage: 26.4 VDC Max. load current: 40 mA Residual voltage: 1 V or less (Load current at 40 mA) Error signal Output signal Maintenance signal Effective static neutralization range 20 to 500 mm Ambient temperature (Operating/Stored) 0 to 55C Ambient humidity (Operating/Stored) 35 to 65% RH (No condensation) Housing ABS

Compact and Lightweight

40 40 40 80 80 Suction flow rate ZB Suction flow rate 20 20 20 20 40 40 ZA 0 0 0 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] 0 0 20 40 60 80 Supply pressure [MPa] 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Hydraulic

x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1 -0.4 D +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20 x 1.5 31 20 C +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M24 x 1.5 40 30 C-series K B +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M30 x 1.5 50 30 A +0.1 0 50 40 M8 x 1.25 185 145 57 79 M39 x 1.5 63 40 Double knuckle joint Material:

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

38.7 31.1 10 18.5 3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 29.4 34.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 39 12.9 R 1/4 23 43.3 48.3 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 53.9 46.5 21 31 43.7 38.7 20.2 10 18.5 3/8" 17.9

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS231F-02-03 32 10.9 30.6 16 16.2 21.9 39.6 10.4 38.7 47.9 21 5/32" 31 20.2 18.5 10 40 1/4 AS331F-02-06 AS231F-02-05 33 10.9 31.1 16.5 23.9 16.2 42.1 11.6 38.5 46.5 17 3/16" 25.2 12.8 6 20.6 12.9 60 17 AS331F-02-08 AS231F-02-07 36 17 18.3 25.6 39.9 34.9 34.2 34.4 29.4 45.1 13.2 18.5 39.7 49.5 18.5 1/4" 28.2 20.6 15.2 8 12.9 63 (17.5) 48.3 43.3 42.8 37.8 23 AS331F-02-10 AS231F-02-09 39 18.5

SYA3000/5000/7000

SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02