Table of Contents

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Table of Contents

101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 50, 63 50, 63 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 100 80 80 Load

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Environment

400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25

A_HEC-OM-K001

Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-14 Recirculating fluid Pressure loss (HED005

Compact Guide Cylinder

20 10 10 Load mass m [kg] Load mass m [kg] 1 0.1 1 10 100 100 10 Eccentric distance L [mm] Eccentric distance L [mm] 20 MGPK Series L L Plate Material Aluminum Alloy /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32

Air Cylinder

20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 (Reference) JW Bore size e f h IJ JH Bore size TB TDe8 TR TZ Z ZZ (Reference) l Z ZZ 20 11 8 0.025 0.047 39 47.6 93 (101) 106 (114) 25 11 10 0.025 0.047 43 53 98 (106) 111 (119) 32 10 (11) 12 0.032 0.059 54.5 67.7 101 (108) 113 (121) 40 10 (12) 14 0.032 0.059 65.5 78.7 118 (125) 130 (139) 50 12 (13) 16 0.032 0.059

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

A

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Compact Hydraulic Cylinder

19 22 19 47 12 37 34 M12 1.25 M20 1.5 50 25 to 800 75 52.3 60 1/2 74 20 57 33 29 28 18 11 32 30 25 28 53 24 42 9 42 M12 1.25 M27 2 63 25 to 800 90 64.3 60 1/2 80 20 55 33 29 36 17 13 32 30 32 36 68 13 30 50 39 M16 1.5 M33 2 80 25 to 800 115 82.7 80 3/4 93 28 66 40 34 45 20 17 39 40 41 45 41 76 9 60 46 M16 1.5 M42 2 100 25 to 1000 130 96.9 100 3/4 101 36 67 40 50 56 20 19 54 50 52

Made to Order

50 stroke or less 34 (46) 37.5 (47.5) 40 (50) 46.5 (56.5) 48.5 (58.5) 54 (64) 63.5 (73.5) 75 (85) 28 35 35 43 59 20 25 32 40 50 63 80 100 CQ2W series A L Bore size (mm) 75, 100 stroke 84 86.5 88 101 114.5 50 stroke or less 74 (84) 76.5 (86.5) 78 (88) 91 (101) 104.5 (114.5) 17 18 18 20 22 40 50 63 80 100 5 5 L + Stroke L A + 2 (Stroke) RQ series (mm) Bore size (mm) A L F T 20 25 32 40 50

CV/MVGQ

81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

AC Servo Motor Driver (Network card type ）

Software limit . 20-101 20.8.4 Torque limit . 20-102 10 - 20.8.5 Polarity . 20-103 20.8.6 Touch probe. 20-104 20.8.7 One-touch tuning . 20-109 20.8.8 Driver life diagnosis function . 20-110 20.8.9 Machine diagnosis . 20-111 20.8.10 Quick stop . 20-112 20.8.11 Halt . 20-113 20.8.12 Ramp Stop . 20-113 20.8.13 PROFIdrive parameter definitions related to alarms . 20-114 20.8.14 Parameter . 20

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

80 P1 60 15 60 40 10 40 Air consumption Q1 Qmax 20 5 20 Suction flow Maximum suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 30 35 40 45 50 75 50 40 30 100 8 9 10 11 12 13 12 80 Allowable lateral load at end (N) 16 18 20 22 24 26 16 20 63 28 31 34 37 40 44 47 50 53 56 20 10 50 44 48 53 57 62 66 71 75 80 84 25 40 32 25 78 86 227 93 101 109 117 125 133 140 148 187 32 5.0 4.0 3.0 109 117 258 125 133 140 148 156 164 172 180 219 40 20 16 407 187 199 211 223 236 248 260 272 285 346 50 2.0 474 254 266 278

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.