Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Series SV

(B) 2 (A) 4 Weights SOL.b SOL.a 3 (EB) 5 (EA) Series Type of actuation Weight g (lbs) Single solenoid 66 (.14) 1 (P) Double solenoid 71 (.15) 4 position dual 3 port valve: N.O./N.O.

SY

Manifold spec. sheets Order made Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Groove VZ Connector AXT661-12 VF L plug connector Cover VFR Lead wire 0.2 to 0.33mm2 Pin VP7 (Max.O.D. 1.7mm) VP4 Locking style (Slotted) Lever Groove Hook Socket DXT170-71-1 Push down on the manual override button with a small screwdriver until it stops. While down, turn clockwise by 90 to lock it. Turn it counterclockwise to release it.

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

DC () Blue Mass (g) D-F5P D-F59 D-F5P D-J59 D-J51 Auto switch model DC (+) Brown 23 23 21 21 0.5 Lead wire length (m) 81 81 71 71 3 127 127 111 111 5 OUT Black Dimensions (mm) D-F59/D-F5P/D-J59 DC () Blue Mounting hole D-J59 Indicator light OUT (+) Brown Main circuit of switch OUT () Blue Most sensitive position D-J51 D-J51 14 6 Main circuit of switch 6 4.5 OUT (~) Brown OUT (~) Blue 4 12

Shot Pin Cylinder CKZP Series ø 57, ø 71

Shot Pin Cylinder CKZP Series 57, 71 How to Order Bore size 57 57 mm equiv.

ITV

Made RP13A-12RB-13PA (71) 8.5 20 (14.3) (14.3) 126 12 11 ARJ 126 12 9 Digital pressure display Digital pressure display AR425 to 935 M5 x 0.8 M5 x 0.8 Air introduction port Air introduction port Air introduction port Air introduction port ARX AMR 19 34 19 34 ARM VAC. VAC. OUT ATM.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Axial foot (L) [mm] XA + Stroke Bore size [mm] E1 TR AH AO AT AB SA XA C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 32 48 32 32 10 4.5 7 142 144 40 55 36 36 11 4.5 10 161 163 50 68 45 45 12 5.5 10 170 175 63 80 50 50 12 5.5 10 185 190 80 100 63 63 14 6.5 12 210 215 100 120 75 71 16 6.5 14.5

SYJ300/500/700

Station n L1 L2 L3 Station 20 236.5 228.5 220.5 3 58 50 42 6 89.5 81.5 73.5 8 110.5 102.5 94.5 10 131.5 123.5 115.5 Station 2 47.5 39.5 31.5 4 68.5 60.5 52.5 5 79 71 63 7 100 92 84 9 121 113 105 11 142 134 126 12 152.5 144.5 136.5 13 163 155 147 14 173.5 165.5 157.5 15 184 176 168 16 194.5 186.5 178.5 17 205 197 189 18 215.5 207.5 199.5 19 226 218 210 4-4-16 3 Port Pilot Operated Solenoid

New

71 73.5 73.5 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 50 50 52.5 52.5 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) 25.5 25.5 28 28 63.5 (70) 68.5 (74.5) 76.5 (82.5) 79.5 (85) 100 (106.5) 108 (114.5) 119 (126) 125 (131) 102 102 104.5 104.5 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) ( ) are the dimensions of Normally Open (N.O.). < > are the dimensions of aluminum body.

LEC-OM069xx

Operating Procedure.5-54 5.7.3 Related Parameters.5-55 5.8 Additional Adjustment Function.5-56 5.8.1 Switching Gain Settings.5-56 5.8.2 Manual Adjustment of Friction Compensation.5-61 5.8.3 Current Control Mode Selection Function.5-63 5.8.4 Current Gain Level Setting.5-63 5.8.5 Speed Detection Method Selection.5-63 5.8.6 Backlash Compensation Function.5-64 5.8.7 Torque Reference Filter.5-71

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 57 10 7 40 10 to 50, 75, 100 116 M8 x 1.25 104 13 16(15.8) 64 17.5 M8 x 1.25 86 7 14 12 50 6.6 11 71 14 71 10 8 Note) Figures in ( ) are the dimensions for applying a wrench.

Compact End Lock Cylinder Series CBQ2

bolt 99.2 75 59 88.7 64.5 48.5 17 38.5 6.6 40 LH LY 101.7 75.5 52.5 91.7 65.5 42.5 18 43.5 9 50 103.2 77 51 97.2 71 45 18 43.5 11 63 LT LG X X Y Y LX LZ 4-LD Bore size (mm) LS + Stroke A + Stroke LG LH LZ X Y LT LX LY 32 4 30 3.2 57 57 71 11.2 5.8 Rod end male threads 40 4 33 3.2 64 64 78 11.2 7 50 5 39 3.2 79 78 95 14.7 8 63 5 46 3.2 95 91.5 113 16.2 9 L1 Rod end nut Front flange type/CBQ2F

One-touch Fittings Series KQ2

(71) 76 80 16 Reference dimensions after R(PT) thread installation.

Hydraulic Filters

71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

30

M5 x 0.8 1/8 1/4 A 4 9.1 12.6 L2 14.4 4.2 H Connection thread 14.7 3.5 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 19 21.2 22.2 22 23.6 24.6 24.9 26.5 27.5 30.4 28.6 29.5 32.4 34.5 37 6 11.4 13.6 15.9 11.4 (R) Applicable tube 18.6 L1 8 13.7 16.1 21.6 M 19.1 20 21.6 D A 10 16.6 17 21 35.2 L2 H Connection thread (with sealant) 22.6 50.2 12 18.7 18.6 23.6 26.3 27.3 71

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E Applicable size Y200-D 3.2 35 13.2 42 0.6 JSXM20 Y300-D 4.2 43 16.2 53 JSXM30 Y400-D 5.2 51 19.2 71 JSXM40 Part no.

Suction Guard (Produced upon receipt of order) FHG Series

71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.