CG1

Replacement Parts/With rubber bumper Bore size (mm)/Part No. 20 PDU-8Z PPD-20 CM-020-16-123 No.

LX

X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 91.5 123 X22 200

ZP

(22) ZPR10 29 (23) 31 (21) 29 (23) 31 (22) ZPR13 31 (23) 31 (22) ZPR16 ZPR20 (51) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

MU

Position of piston across 4 flats of double rod is not same. 7-8-11 12 Series MUW Dimensions of Each Mounting Foot style LS + Stroke (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUWL25 MUWL32 MUWL40 MUWL50 MUWL63 Flange style (mm) FZ 24 28 32 39 50 FY 66 82

CXS

D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N DC(+) Brown [Red] Lead wire length: 0.5m 6 7 7 6 7 7 Lead wire length: 3m 31 37 37 31 37 37 Main circuit of switch OUT Black [White] DC() Blue [Black] Dimensions D-F9N, D-F9P, D-F9B D-F9P(V) DC(+) Brown [Red] Main circuit of switch OUT Black [White] DC() Blue [Black] D-F9B(V) OUT(+) Brown [Red] D-F9NV, DF9PV, D-F9BV Main circuit of switch OUT() Blue

MU

Position of piston across 4 flats of double rod is not same. 2.4-8 Plate Cylinder/Double Acting Double Rod Series MUW Dimensions Foot (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUWL25 MUWL32 MUWL40 MUWL50 MUWL63 CU Flange CQS CQ2 MU (mm) FZ 24 28 32 39 50 FY

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vibration, Noise Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl25 M4 1.5 4.5 24 LEFl32 M5 3 5.5 30 LEFl40 M6 5.2 6.6 31 LER LEH Items for internal check 1. Lubricant condition on moving parts. 2. Loose or mechanical play in fixed parts or fixing screws.

7

P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .

HRX-OM-X084

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-W002

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-X071

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Plate Cylinder

Position of the 4 flats of the piston rod for double rod type is not the same. 11 Plate Cylinder: Double Acting, Double Rod Series MUW Dimensions with Mounting Bracket Foot LY 4 x LD LT Y X X Y LX LS + Stroke LZ (mm) LD 5.5 6.6 9 11 13.5 LH 29 37 46 57 67 LS 79 90 96 116 123 LT 3.2 4.5 4.5 5 6 LX 11 12 15 18 22 LY 56 71 89 109 129 LZ 23 27 31 37 48 X 12 16 18 21 24 Y 6 8 10 11 14 Model MUWL25

Dual Rod Cylinder Series CXSJ/CXS

(N) Operating pressure (MPa) Deflection X mm Rod size (mm) Bore size (mm) direction Piston area (mm2) Operating 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 OUT 11.2 56 CXSJ6 4 4.6 21.7 18.6 15.5 12.4 9.3 IN 6.2 31 110 94.2 78.5 62.8 47.1 OUT 31.4 157 15.7 Extended rod CXSJ10 6 70.0 60.0 50.0 40.0 30.0 IN 20.0 100 10.0 247 212 177 141 106 OUT 70.6 353 35.3 CXSJ15 8

LEC-OM005xx

Electric actuators/Common precautions . 119 8.1 Design and selection . 119 8.2 Mounting . 120 8.3 Handling . 121 8.4 Operating environment . 122 8.5 Maintenance . 123 8.6 Precautions for actuator with lock . 123 9.

EX500

(M12, 8 pins, plug) (Pitch) P = 20 25 Connector for input device connection (M12, 4 pins, socket) DIN rail 47 31 8 5.5 35 31 60 L2 L3 (L4) Position indicator LED 5 Marker: BN-WH (Made by Phoenix Contact) (Rail mounting pitch: 12.5) L1 46.9 44.2 EX500-IB1 EX500-IE3 EX500-IE3 EX500-IE3 EX500-IE3 EX500-IE3 EX500-IE3 EX500-IE3 EX500-IE3 32.2 (7.5) (PNP) VOLTAGE IP CODE 24VDC/60mA IP65 IP65 24VDC