Compact

44 46 49 51 20 67 70 75 79 83 88 92 97 101 105 25 103 110 116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DB A C C D C D D -X 20 25 32 30.5 36.5 (35) 3.5 4 2.5 (1) 38.5 6.5 40.5 32 38 (36.5) 2 5.5 4 (2.5) 40 8 42 2042.5 48.5 (47) 0.5 7 5.5 (4) 50.5 9.5 52.5 Data As for auto switch mounting

HRX-OM-X084

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-42 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Communication error alarm detection time 27. Press the [] key. Displays screen for setting the communication error alarm detection time. Time (sec.) to generate alarm AL29: Communication error can be changed.

HRX-OM-W002

MENU Chiller energizing time at alarm accurrence is displayed Alarm occurrence number AL10 123 NO2 ENT Fig 5-4 Key operation (4/4) HRR Series 5.2 Function 5-5 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.3 List of parameters The parameter list of this product is shown below. 5.3.1 Main Menu Table 5.3-1 Main menu parameter list ScreenNo.

HRX-OM-X071

Displays only when the maint / 123 Electric conductivity ( S/cm) RESET DIPV / 1In the case of option Z, Z1, non-display. 2 400V type only 3 Option DM only.

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimensions L=12.5n+10.5 1 6 2 9 3 12 4 15 5 18 6 21 7 24 8 27 9 30 10 33 11 36 12 39 13 42 14 45 15 47 16 50 17 53 18 56 19 59 20 62 Station No. 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 785.5 L DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting

VEX1

Port size Thread S With surge voltage suppressor Rc(PT) Port size Port R port P, A port Without subplate 01 02 Z With indicator light and surge voltage suppressor (Except for grommet) Body size T NPTF F G(PF) N NPT 22 1 8 1 4 Without subplate 02 03 Electrical entry Symbol Electrical entry 1 100V AC (50/60Hz) Voltage (Only solenoids) G Grommet, 300mm lead wire 1 4 3 8 2 200V AC (50/60Hz) 42

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 8 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 10 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT

Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT