Table of Contents

308 309 310 311 312 Symbol 200 Note 1) 201 Note 1) 202 203 204 205 Note 1) In the case of option S, model no. will be differed.

MB

(mm) l ZZ Note) h Bore (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 1 to 50 51 to 100 51 to 100 101 to 150 101 to 150 151 to 200 151 to 200 201 to 300 201 to 300 301 to 400 301 to 400 401 to 500 401 to 500 501 to 600 501 to 600 601 to 700 601 to 700 701 to 800 701 to 800 801 to 900 801 to

70astamb1

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 41 23 12.5

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

CQS

JIS symbol Theoretical Force Unit: N OUT IN Operating pressure (MPa) Rod diameter (mm) Piston area (mm 2) Bore size (mm) Operation 0.3 0.5 0.7 84.8 IN 25 42 59 12 6 CU 113 OUT 34 57 79 151 IN 45 75 106 16 CQS 8 201 OUT 60 101 141 236 IN 71 118 165 CQ2 20 10 314 OUT 94 157 220 MU 378 IN 113 189 264 25 12 491 OUT 147 245 344 Intermediate Strokes Spacer is attached on standard stroke body.

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

VQC

C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

L n Dimensions 10 313 326 L1 L2 9 288 301 8 263 276 13 388 401 7 238 251 14 413 426 6 213 226 15 438 451 5 188 201 16 463 476 4 163 176 12 363 376 17 488 501 3 138 151 11 338 351 18 513 526 2-5-17 Base Mounted Series VQ4000 L IP65 compliant Kit (Lead wire cable) Manifold Specifications Enclosure IP65 compliant Direct electrical entry. Models with two or more stations are available.

AC Servo Motor Driver (Network card type ）

PROFINET COMMUNICATION 201 to 20176 20.1 PROFINET COMMUNICATION . 20-3 20.1.1 Description . 20-3 9 - 20.1.2 Communication specifications . 20-5 20.1.3 Startup . 20-6 20.1.4 Network disconnection procedure . 20-7 20.1.5 Object dictionary (OD) . 20-7 20.1.5.1 Section definition of object dictionary . 20-7 20.2 PROFINET NETWORK CARD (LEC-S-NP) . 20-8 20.2.1 Specifications . 20-8 20.2.2 Parts

5 Port Solenoid Valve, Series VQC

C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201

Integrated Controller

to 400 76 58 25 20 29 22 36 20 to 39 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 48 Easy to Operate EQY H Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor EQY16DH Grease supply port (For 200 mm stroke or more) Vent hole (20) 88 Required space: J5 Opposite end [Origin end]2 Rod operating range1 Origin end2 (35.6) [

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Station L1 L2 Port size One-touch fitting 625 3 Port Pilot Solenoid Valve 10-SYJ500 Type 41 Manifold: Side Ported/10-SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

176 131 106 161 136 201 5 to 50, 75,100 176 136.5 111.5 170.5 145.5 214.5 189.5 136.5 111.5 170.5 145.5 214.5 10 to 50, 75,100 189.5 Data Foot bracket material: Carbon steel Bore size (mm) L LD LG LH LT LX LY LZ X Y 63 80 100 95 3.2 46 5 9 11 91.5 113 16.2 18 118 4.5 59 7 11 13 114 140 19.5 20 137 6 71 7 12.5 13 136 162 23 22 Flange style: CQ2WF/CDQ2WF M FV FT L1 B A + Stroke L2 + Stroke

Manifold Specifications

301 310 15 321 330 16 341 350 L1 L2 Insert plug with lead wire: VV5ZS2-51GStation 1Port size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201

ZP

EPR ZPT40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT80HBNJ25-B01-A18 ZPT 80HBNJ50-B01-A18 75-B01-A18 ZPT100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 268 289 535 575 620 659 719 759 804 843 127 147 168 143 163 201 208 228 249 231 Misc. 40 50 63 80 100

CQ2

136 161 106 131 176 201 136 161 106 131 CQS 10 to 50, 75,100 189.5 214.5 145.5 170.5 111.5 136.5 189.5 214.5 145.5 170.5 111.5 136.5 mm CQ2 Bore (mm) L LD LG LH LT LX LY LZ X Y 18 11 5 46 3.2 95 91.5 63 80 100 113 16.2 9 MU 13 7 59 4.5 118 114 140 19.5 11 20 13 7 71 6 137 136 162 23 12.5 22 Flange/CQ2WF, CDQ2WF Rod end male thread (mm) Without auto switch A1 L3 With auto switch Bore (mm)

MG

181 161 141 121 101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DHead end lock Rod end lock Releasing the Lock Operating Precautions -X Warning Caution 201.

Table of Contents

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MGG

11 160 140 182 For long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201