Vacuum Unit

Symbol Type Pressure range [kPa] Symbol Type Note Nil Without option V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 B Mounting bracket for single unit (nuts and bolts are included) Bracket V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

) Blanking plate SYJ7000-21-1 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Spacer type regulating valve on manifold block can regulate the pressure to the valve individually.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

28 5 15 15 24 62 116 20 Up to 300 33.5 M10 X 1.25 19.5 17 32 10 7.5 6 8 25.3 37 M26 X 1.5 22 13 8 45 5.5 15 15 30 62 120 26 Up to 300 39.3 37.5 M10 X 1.25 34.5 19.5 17 32 12 7.5 6 8 27.6 M26 X 1.5 22 13 8 45 5.5 15 15 64 122 26 Up to 300 47.8 46.5 42.5 21 22 41 14 10.7 8 10 33.6 M14 X 1.5 21.5 M32 X 2 24 16 11 50 7 19 88 154 32 With rod boot h l Symbol e f 51 to 100 101 to 150 151 to 200

Electric Actuators

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded

MGG

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

21

14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 M14 x 1.5 42.5 NN M20 x 1.5 P S 55 TD 8 TT 10 TX 32 TY 32 TZ 52 Z ZZ 101 Bore size 20 25 32 40 M5 x 0.8 91 M26 x 1.5 M5 x 0.8 56 9 10 40 40 60 95 105 M26 x 1.5 Rc1/8 62 9 10 40 40 60 101 111 M32 x 2 Rc1/8 67 10 11 53 53 77 114.5 125 Use a thin wrench when tightening the piston rod.

TABLE OF CONTENTS

PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.

Refrigerated Air Dryers

IDF1E to 75E IDU3E to 75E p. 40, 41 Foundation bolt set For fixing the air dryer to the foundations. Easy to secure by striking the axle. Stainless steel IDF4E to 75E IDU3E to 75E IDF100F to 150F p. 41 Piping adapter For converting the thread type of an IN/OUT fitting for air dryers.

mb1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

Square Tube Type Air Cylinder Series MB1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

70astamb1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

Digital Flow Switch (Integrated display type) ( compatible)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

VCA

+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161

VCA

+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348 359 384 395 404 415 448 459 7 278 289 314 325 322 333 366 377 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 3 138 149 174 185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295