Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 6.8 VACUUM VACUUM SWITCH SERIES ZS VACUUM SWITCH SERIES ZSM1 DIAPHRAGM TYPE 100 ms Response Time Compact Size T E C H N I C A L SPECIFICATIONS ZSM1 (VA C U U M E J E C T O R T Y P E) Model ZSM1-115 ZSM1-121 Electrical switch type Solid state NPN Contact (reed switch) Fluid Air, Inert

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

Hygienic Design Cylinder Series HY

H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5 23 23 5 4.5 5 5 4 4 4 4 14 15 17 17 48 54 69 69 6 7 10 10 16 16 16 16 3.2 3.2 4.2 4.2 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 6 6.5 8 8 10 13 16 16 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 28 28 32 32 1/8 1/4 1/4 3/8 94 105 106 121

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

Compact Guide Cylinder

Height (Compared with the current product (MGP-Z)) Overall length (Compared with the current product (MGP-Z)) Current product MGP-Z [mm] Current product CXS [mm] Current product MGP-Z [mm] Current product CXS [mm] JMGP [mm] JMGP [mm] Bore size [mm] Bore size Stroke [mm] 12 26 17 17*1 12-10 stroke 52 43 82*1 16 30 18 20*2 16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

MU

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141 165 189 212 236 Flange MGZ-F05 MGZ-F06 MGZ-F08 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 Switch spacer 121

MTS

377 283 10 8 23 17 40 30 63 47 98 72 161 121 251 188 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 Stud Bolt Part No. 12 Bore size (mm) Part no. 16 8 MT-S8 12 MT-S12 20 16 MT-S16 25 20 MT-S20 25 MT-S25 32 32 MT-S32 40 40 MT-S40 Replacement parts for rod end male thread.

Compact Guide Cylinder Series MGQ

, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 MGF 0UT 201 40 60 80 101 121

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Modular/F.R.L. Units Series AC

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard