Plug-in/Plug Lead: Single Unit

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 41 Electric Slide Table/High Rigidity Type Series LESH Model Selection Specific Product Precautions Dimensions: Symmetrical Type/L Type LESH8L 3 x M3 x 0.5 thread depth 5.5 depth 3 3 +0.03 +0.01 A-A 5 10 6 x M3 x 0.5 thread depth 5 Note 4) C C 11.5 G x M4 x 0.7 thread depth 8 26.5 32 6.5 A 7 6.5 3.2 2 Servo Motor

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE B X 2 E X G Seal Y200T Y400T J F A H K Spacer width D Model A B BB C D E EE F G G H J K Applicable model Y100T 6 56 24.5 40.5 20 27 6.8 4.5 4.5 14 2.8 25 AC10 Y200T 3 67 29 53 24 33 12 5.5 5.5 19 3.2 30 AC20 Y300T 4 82 41 68 35 14 7 7 21 4 41 AC25, AC30 Y400T 5 96 48 81.5 40

VM

16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-

Best Pneumatics Vol. 14

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 (mm) Standard specifications Accessory specifications With pressure gauge With auto drain Bracket mounting size Model Port size C D B A L 5.5 7 7 9 9 K 12 14 14 18 18 G 30 41 41 50 50 H 24 35 35 40 40 J 33 F 43 57

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 T Single round shaft Double shaft (Long shaft without key and with our chamfers) J CRB1 K Double round shaft MSU CRJ CRA1 Dimensions (mm) J (Double shaft/Long shaft without key & with four chamfers) CRQ2 T (Single round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Modular F.R.L. Units

41 50 50 43.2 57.2 57.2 75.2 80.2 24 35 35 40 40 33 5.5 7 7 9 9 12 14 14 18 18 3.5 4 4 5 5 29 41 41 48 48 Model Semi-standard specifications Optional specifications Round type pressure gauge Round type pressure gauge (with color zone) With auto drain With barb fitting With drain guide B 91.4 121.9 121.9 153.9 155.9 H 37.5 37.5 37.5 42.5 42.5 J 58.5 58.5 65 72 72 H 37.5 37.5 37.5 42.5 42.5

Precautions 1

75 60 4 7 13 8 30 26 13 34 15.5 18 Up to 300 20 0 0.033 70.5 8 6 45 75 60 4 7 13 10 37 32 17 40 19.5 22 Up to 300 26 0 0.033 76.5 8 6 45 75 60 4 7 13 12 37 32 17 40 19.5 22 Up to 300 26 0 0.039 84.5 10 8 50 82 36 66 5 7 16 14 47.3 41 22 52 21 24 Up to 300 32 (mm) ZZ Z S QY Q NN NA N I MM K Bore size (mm) 20 25 32 40 116 107 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 111 62 14 22 M26

A

46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14

CY1

Spacer Nickel plated 18 Rolled steel plate CY1L6-PS-N Nos. 38, 39, 40, 41 above Ball bushing 19 10 CY1L10-PS-N Nos. 36, 38, 39, 40, 41, 42 above Plug 25, 32, 40 only 20 Brass 15 CY1L15-PS-N Adjustment bolt A Nickel plated 21 Chrome molybdenum steel 20 CY1L20-PS-N Adjustment bolt B Nickel plated Nos. 22 Chrome molybdenum steel 25 CY1L25-PS-N Shock absorber 23 36, 37, 38, 39, 40, 41, 42 32

3 Port Air Operated Valve Series SYJA300 1

Area: (800) 258-9200-www.stevenengineering.com VV3PA5-41-051-03 Base specifications VR 42 41 Individual exhaust Combination symbol Common exhaust Piping 2A Side Side Passage VH Air supply port (P port) is common.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

SQ1000/2000

P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P. 42 P. 49 C6 L6 Terminal number D-sub connector

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type SS5YJ5-42 Type SS5YJ5-43 Adapter gasket SYJ500-6-1 Adapter gasket SYJ500-6-1 Applicable manifold base Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Applicable manifold base Type SS5YJ5-20 Refer to page 92 prior to handling.

0.4

IP20 enclosure compliant P. 41 Integrated-type serial transmission system (for Output) IP20 enclosure compliant P. 45 P. 45 S kit Serial unit: EX120/123/124 Dust-tight, Water-jet-proof (-W) IP65 enclosure compliant P. 45 P. 45 Dust-protected (-XP) Integrated-type serial transmission system (for I/O) Serial unit: EX240 IP65 enclosure compliant P. 49 Circular connector M IP65 (Dust-tight,

Basic type / Direct mount type Series CY3B/CY3R

51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26