2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

(27.7) 306 (68.8) 537 (120.7) 42 (9.4) 23 (5.2) Opening/closing stroke (both sides) mm 6 8 8 12 16 4 4 Weight g (oz) 134 (4.7) 345 (12.2) 265 (9.4) 515 (18.2) 952 (33.6) 96 (3.4) 58 (2.0) Note) Values for 16 to 25 are with gripping point L = 20mm, and for 32 to 63 with gripping point L = 30mm.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

52 64 52 61 73 57 60 72 73 81 104 72 80 104 92 100 124 90 98 123 10 26 15.5 1.5 1.4 10 4 2.5 6 4 14 10 15.2 3 5 25.7 19 12 5 4 9.4 17 20.5 16.2 12 27.2 14 8 6 5 14 17 6.5 5.5 18 22 10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

Compact

44 46 49 51 20 67 70 75 79 83 88 92 97 101 105 25 103 110 116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DB A C C D C D D -X 20 25 32 30.5 36.5 (35) 3.5 4 2.5 (1) 38.5 6.5 40.5 32 38 (36.5) 2 5.5 4 (2.5) 40 8 42 2042.5 48.5 (47) 0.5 7 5.5 (4) 50.5 9.5 52.5 Data As for auto switch mounting

HRX-OM-X084

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-42 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Communication error alarm detection time 27. Press the [] key. Displays screen for setting the communication error alarm detection time. Time (sec.) to generate alarm AL29: Communication error can be changed.

HRX-OM-W002

MENU Chiller energizing time at alarm accurrence is displayed Alarm occurrence number AL10 123 NO2 ENT Fig 5-4 Key operation (4/4) HRR Series 5.2 Function 5-5 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.3 List of parameters The parameter list of this product is shown below. 5.3.1 Main Menu Table 5.3-1 Main menu parameter list ScreenNo.

HRX-OM-X071

Displays only when the maint / 123 Electric conductivity ( S/cm) RESET DIPV / 1In the case of option Z, Z1, non-display. 2 400V type only 3 Option DM only.

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimensions L=12.5n+10.5 1 6 2 9 3 12 4 15 5 18 6 21 7 24 8 27 9 30 10 33 11 36 12 39 13 42 14 45 15 47 16 50 17 53 18 56 19 59 20 62 Station No. 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 785.5 L DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting

VEX1

Port size Thread S With surge voltage suppressor Rc(PT) Port size Port R port P, A port Without subplate 01 02 Z With indicator light and surge voltage suppressor (Except for grommet) Body size T NPTF F G(PF) N NPT 22 1 8 1 4 Without subplate 02 03 Electrical entry Symbol Electrical entry 1 100V AC (50/60Hz) Voltage (Only solenoids) G Grommet, 300mm lead wire 1 4 3 8 2 200V AC (50/60Hz) 42

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

17.7 AS221F-N02-07SD AS221F-02-10SD NPT 1/4 17.5 18.5 7.2 1.2 34.7 1/4" 13.2 25.2 34.5 17 21 10 18.5 44.5 35.3 44 42 18.3 40.2 AS221F-N02-09SD AS321F-02-06SD 5/16" 15.2 27.2 36.4 18.5 39.3 27.8 17 6 12.8 73 44 AS221F-N02-11SD AS321F-02-08SD 18.3 35.3 44.5 41 3/8" 29.5 18.5 8 15.2 21 76 18.3 R 1/4 19 23 9.8 1.2 49.3 21.3 54.8 AS321F-N02-07SD AS321F-02-10SD 1/4" 13.2 27.8 39.3 17 43.3 31.8

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42

53

HED 29 HEA IDH 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.

Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.